JPS51137370A - Electron line detector - Google Patents

Electron line detector

Info

Publication number
JPS51137370A
JPS51137370A JP6097375A JP6097375A JPS51137370A JP S51137370 A JPS51137370 A JP S51137370A JP 6097375 A JP6097375 A JP 6097375A JP 6097375 A JP6097375 A JP 6097375A JP S51137370 A JPS51137370 A JP S51137370A
Authority
JP
Japan
Prior art keywords
electron line
line detector
seintillator
plastic
fluorescent material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6097375A
Other languages
Japanese (ja)
Inventor
Shigeto Sunakozawa
Tadao Watabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6097375A priority Critical patent/JPS51137370A/en
Publication of JPS51137370A publication Critical patent/JPS51137370A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To improve light emitting efficiency by coating thinly inorganic powder fluorescent material on the surface of plastic seintillator layer and by emitting electron line emitted from the fluorescent material side after converting to light from the back surface of the plastic seintillator layor.
JP6097375A 1975-05-23 1975-05-23 Electron line detector Pending JPS51137370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6097375A JPS51137370A (en) 1975-05-23 1975-05-23 Electron line detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6097375A JPS51137370A (en) 1975-05-23 1975-05-23 Electron line detector

Publications (1)

Publication Number Publication Date
JPS51137370A true JPS51137370A (en) 1976-11-27

Family

ID=13157864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6097375A Pending JPS51137370A (en) 1975-05-23 1975-05-23 Electron line detector

Country Status (1)

Country Link
JP (1) JPS51137370A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015005351A (en) * 2013-06-19 2015-01-08 日本電子株式会社 Detector, and charged particle beam apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015005351A (en) * 2013-06-19 2015-01-08 日本電子株式会社 Detector, and charged particle beam apparatus

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