JPS51134997A - Laser-utilizing processing device - Google Patents

Laser-utilizing processing device

Info

Publication number
JPS51134997A
JPS51134997A JP50059880A JP5988075A JPS51134997A JP S51134997 A JPS51134997 A JP S51134997A JP 50059880 A JP50059880 A JP 50059880A JP 5988075 A JP5988075 A JP 5988075A JP S51134997 A JPS51134997 A JP S51134997A
Authority
JP
Japan
Prior art keywords
laser
processing
processing device
utilizing processing
laser spot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50059880A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5423480B2 (show.php
Inventor
Ken Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50059880A priority Critical patent/JPS51134997A/ja
Publication of JPS51134997A publication Critical patent/JPS51134997A/ja
Publication of JPS5423480B2 publication Critical patent/JPS5423480B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
JP50059880A 1975-05-20 1975-05-20 Laser-utilizing processing device Granted JPS51134997A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50059880A JPS51134997A (en) 1975-05-20 1975-05-20 Laser-utilizing processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50059880A JPS51134997A (en) 1975-05-20 1975-05-20 Laser-utilizing processing device

Publications (2)

Publication Number Publication Date
JPS51134997A true JPS51134997A (en) 1976-11-22
JPS5423480B2 JPS5423480B2 (show.php) 1979-08-14

Family

ID=13125891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50059880A Granted JPS51134997A (en) 1975-05-20 1975-05-20 Laser-utilizing processing device

Country Status (1)

Country Link
JP (1) JPS51134997A (show.php)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02211994A (ja) * 1989-02-13 1990-08-23 Matsushita Electric Ind Co Ltd レーザー加工装置
JP2011121119A (ja) * 2009-12-07 2011-06-23 Panasonic Corp テーパを有しない、または逆テーパを有する穴を開ける装置および方法
JP2021093487A (ja) * 2019-12-12 2021-06-17 三菱電機株式会社 レーザアニール装置および半導体装置の製造方法
CN113355491A (zh) * 2021-05-28 2021-09-07 丹阳宏图激光科技有限公司 一种减小激光淬火搭接软带宽度的激光淬火工艺

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02211994A (ja) * 1989-02-13 1990-08-23 Matsushita Electric Ind Co Ltd レーザー加工装置
JP2011121119A (ja) * 2009-12-07 2011-06-23 Panasonic Corp テーパを有しない、または逆テーパを有する穴を開ける装置および方法
JP2021093487A (ja) * 2019-12-12 2021-06-17 三菱電機株式会社 レーザアニール装置および半導体装置の製造方法
CN113355491A (zh) * 2021-05-28 2021-09-07 丹阳宏图激光科技有限公司 一种减小激光淬火搭接软带宽度的激光淬火工艺

Also Published As

Publication number Publication date
JPS5423480B2 (show.php) 1979-08-14

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