JPS522786A - Method for collecting electricity charged particle rays - Google Patents

Method for collecting electricity charged particle rays

Info

Publication number
JPS522786A
JPS522786A JP50079189A JP7918975A JPS522786A JP S522786 A JPS522786 A JP S522786A JP 50079189 A JP50079189 A JP 50079189A JP 7918975 A JP7918975 A JP 7918975A JP S522786 A JPS522786 A JP S522786A
Authority
JP
Japan
Prior art keywords
charged particle
electricity charged
particle rays
collecting electricity
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50079189A
Other languages
Japanese (ja)
Inventor
Hirotami Koike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP50079189A priority Critical patent/JPS522786A/en
Publication of JPS522786A publication Critical patent/JPS522786A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To enlarge the distance between the lens and sample for the electronic rays to be applied on the sample with its sufficient applying current intensity and thin diameter.
JP50079189A 1975-06-24 1975-06-24 Method for collecting electricity charged particle rays Pending JPS522786A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50079189A JPS522786A (en) 1975-06-24 1975-06-24 Method for collecting electricity charged particle rays

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50079189A JPS522786A (en) 1975-06-24 1975-06-24 Method for collecting electricity charged particle rays

Publications (1)

Publication Number Publication Date
JPS522786A true JPS522786A (en) 1977-01-10

Family

ID=13683019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50079189A Pending JPS522786A (en) 1975-06-24 1975-06-24 Method for collecting electricity charged particle rays

Country Status (1)

Country Link
JP (1) JPS522786A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6662713B2 (en) 2001-11-09 2003-12-16 Kabushiki Kaisha Tokyo Kikai Seisakusho Binding apparatus with a fusible band, and a delivery system incorporating the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6662713B2 (en) 2001-11-09 2003-12-16 Kabushiki Kaisha Tokyo Kikai Seisakusho Binding apparatus with a fusible band, and a delivery system incorporating the same

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