Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Hitachi Ltd
Original Assignee
Hitachi Ltd
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Filing date
Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP4968175ApriorityCriticalpatent/JPS51126079A/en
Publication of JPS51126079ApublicationCriticalpatent/JPS51126079A/en
Production Of Multi-Layered Print Wiring Board
(AREA)
Internal Circuitry In Semiconductor Integrated Circuit Devices
(AREA)
Abstract
PURPOSE:Growth method of many layer wiring enabling the degree of accumulation to rise as to be able to make the connection hole a smaller diameter and making thinner the isolation film layer among the many wiring layers of the accumulation circuit.
JP4968175A1975-04-251975-04-25Growth method of many layer wiring
PendingJPS51126079A
(en)