JPS51123739A - Silicon etching process - Google Patents
Silicon etching processInfo
- Publication number
- JPS51123739A JPS51123739A JP4881675A JP4881675A JPS51123739A JP S51123739 A JPS51123739 A JP S51123739A JP 4881675 A JP4881675 A JP 4881675A JP 4881675 A JP4881675 A JP 4881675A JP S51123739 A JPS51123739 A JP S51123739A
- Authority
- JP
- Japan
- Prior art keywords
- etching process
- silicon etching
- silicon
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4881675A JPS51123739A (en) | 1975-04-22 | 1975-04-22 | Silicon etching process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4881675A JPS51123739A (en) | 1975-04-22 | 1975-04-22 | Silicon etching process |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51123739A true JPS51123739A (en) | 1976-10-28 |
Family
ID=12813724
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4881675A Pending JPS51123739A (en) | 1975-04-22 | 1975-04-22 | Silicon etching process |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51123739A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53124978A (en) * | 1977-04-07 | 1978-10-31 | Fujitsu Ltd | Etching solution of semiconductive film |
US6316370B1 (en) | 1999-04-05 | 2001-11-13 | Micron Technology, Inc. | Method for etching doped polysilicon with high selectivity to undoped polysilicon |
CN103409808A (zh) * | 2013-09-04 | 2013-11-27 | 常州时创能源科技有限公司 | 多晶硅片制绒添加剂及其使用方法 |
-
1975
- 1975-04-22 JP JP4881675A patent/JPS51123739A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53124978A (en) * | 1977-04-07 | 1978-10-31 | Fujitsu Ltd | Etching solution of semiconductive film |
US6316370B1 (en) | 1999-04-05 | 2001-11-13 | Micron Technology, Inc. | Method for etching doped polysilicon with high selectivity to undoped polysilicon |
US6833084B2 (en) * | 1999-04-05 | 2004-12-21 | Micron Technology, Inc. | Etching compositions |
CN103409808A (zh) * | 2013-09-04 | 2013-11-27 | 常州时创能源科技有限公司 | 多晶硅片制绒添加剂及其使用方法 |
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