JPS51122583U - - Google Patents
Info
- Publication number
- JPS51122583U JPS51122583U JP4064175U JP4064175U JPS51122583U JP S51122583 U JPS51122583 U JP S51122583U JP 4064175 U JP4064175 U JP 4064175U JP 4064175 U JP4064175 U JP 4064175U JP S51122583 U JPS51122583 U JP S51122583U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975040641U JPS5654596Y2 (enExample) | 1975-03-25 | 1975-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975040641U JPS5654596Y2 (enExample) | 1975-03-25 | 1975-03-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51122583U true JPS51122583U (enExample) | 1976-10-04 |
| JPS5654596Y2 JPS5654596Y2 (enExample) | 1981-12-19 |
Family
ID=28166624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975040641U Expired JPS5654596Y2 (enExample) | 1975-03-25 | 1975-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5654596Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6467990A (en) * | 1987-09-08 | 1989-03-14 | Komatsu Mfg Co Ltd | Wavelength controller for excimer laser |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2657487B2 (ja) * | 1987-03-19 | 1997-09-24 | 株式会社小松製作所 | レーザの波長制御装置および方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4937316A (enExample) * | 1972-08-04 | 1974-04-06 |
-
1975
- 1975-03-25 JP JP1975040641U patent/JPS5654596Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4937316A (enExample) * | 1972-08-04 | 1974-04-06 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6467990A (en) * | 1987-09-08 | 1989-03-14 | Komatsu Mfg Co Ltd | Wavelength controller for excimer laser |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5654596Y2 (enExample) | 1981-12-19 |