JPS51121267U - - Google Patents

Info

Publication number
JPS51121267U
JPS51121267U JP2976U JP2976U JPS51121267U JP S51121267 U JPS51121267 U JP S51121267U JP 2976 U JP2976 U JP 2976U JP 2976 U JP2976 U JP 2976U JP S51121267 U JPS51121267 U JP S51121267U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2976U
Other languages
Japanese (ja)
Other versions
JPS5218594Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2976U priority Critical patent/JPS5218594Y2/ja
Publication of JPS51121267U publication Critical patent/JPS51121267U/ja
Application granted granted Critical
Publication of JPS5218594Y2 publication Critical patent/JPS5218594Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP2976U 1976-01-06 1976-01-06 Expired JPS5218594Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2976U JPS5218594Y2 (enrdf_load_stackoverflow) 1976-01-06 1976-01-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2976U JPS5218594Y2 (enrdf_load_stackoverflow) 1976-01-06 1976-01-06

Publications (2)

Publication Number Publication Date
JPS51121267U true JPS51121267U (enrdf_load_stackoverflow) 1976-10-01
JPS5218594Y2 JPS5218594Y2 (enrdf_load_stackoverflow) 1977-04-26

Family

ID=28053561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2976U Expired JPS5218594Y2 (enrdf_load_stackoverflow) 1976-01-06 1976-01-06

Country Status (1)

Country Link
JP (1) JPS5218594Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60168580A (ja) * 1984-02-10 1985-09-02 呉船産業株式会社 基板洗浄装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60168580A (ja) * 1984-02-10 1985-09-02 呉船産業株式会社 基板洗浄装置

Also Published As

Publication number Publication date
JPS5218594Y2 (enrdf_load_stackoverflow) 1977-04-26

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term