JPS5218594Y2 - - Google Patents
Info
- Publication number
- JPS5218594Y2 JPS5218594Y2 JP2976U JP2976U JPS5218594Y2 JP S5218594 Y2 JPS5218594 Y2 JP S5218594Y2 JP 2976 U JP2976 U JP 2976U JP 2976 U JP2976 U JP 2976U JP S5218594 Y2 JPS5218594 Y2 JP S5218594Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2976U JPS5218594Y2 (ja) | 1976-01-06 | 1976-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2976U JPS5218594Y2 (ja) | 1976-01-06 | 1976-01-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51121267U JPS51121267U (ja) | 1976-10-01 |
| JPS5218594Y2 true JPS5218594Y2 (ja) | 1977-04-26 |
Family
ID=28053561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2976U Expired JPS5218594Y2 (ja) | 1976-01-06 | 1976-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5218594Y2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60168580A (ja) * | 1984-02-10 | 1985-09-02 | 呉船産業株式会社 | 基板洗浄装置 |
-
1976
- 1976-01-06 JP JP2976U patent/JPS5218594Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51121267U (ja) | 1976-10-01 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |