JPS51114445A - An apparatus for controlling a coating process - Google Patents

An apparatus for controlling a coating process

Info

Publication number
JPS51114445A
JPS51114445A JP3967875A JP3967875A JPS51114445A JP S51114445 A JPS51114445 A JP S51114445A JP 3967875 A JP3967875 A JP 3967875A JP 3967875 A JP3967875 A JP 3967875A JP S51114445 A JPS51114445 A JP S51114445A
Authority
JP
Japan
Prior art keywords
controlling
coating process
image pickup
semiconductor element
pickup semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3967875A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5315936B2 (enrdf_load_stackoverflow
Inventor
Akio Imaizumi
Hisayuki Umetsu
Hirokuni Inasumi
Hisatoshi Masagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Tateisi Electronics Co
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tateisi Electronics Co, Omron Tateisi Electronics Co filed Critical Tateisi Electronics Co
Priority to JP3967875A priority Critical patent/JPS51114445A/ja
Publication of JPS51114445A publication Critical patent/JPS51114445A/ja
Publication of JPS5315936B2 publication Critical patent/JPS5315936B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Spray Control Apparatus (AREA)
JP3967875A 1975-03-31 1975-03-31 An apparatus for controlling a coating process Granted JPS51114445A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3967875A JPS51114445A (en) 1975-03-31 1975-03-31 An apparatus for controlling a coating process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3967875A JPS51114445A (en) 1975-03-31 1975-03-31 An apparatus for controlling a coating process

Publications (2)

Publication Number Publication Date
JPS51114445A true JPS51114445A (en) 1976-10-08
JPS5315936B2 JPS5315936B2 (enrdf_load_stackoverflow) 1978-05-29

Family

ID=12559744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3967875A Granted JPS51114445A (en) 1975-03-31 1975-03-31 An apparatus for controlling a coating process

Country Status (1)

Country Link
JP (1) JPS51114445A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443949A (en) * 1977-09-13 1979-04-06 Ransburg Japan Ltd Coating apparatus having stroke automatic control device
JPS54105146A (en) * 1978-02-06 1979-08-17 Nat Jutaku Kenzai Applicator

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4708696B2 (ja) * 2003-11-04 2011-06-22 芝浦メカトロニクス株式会社 溶液の供給装置及び供給方法
JP2007319857A (ja) * 2007-08-03 2007-12-13 Seiko Epson Corp 成膜装置
JP2009101354A (ja) * 2008-12-01 2009-05-14 Seiko Epson Corp 光学部材の製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443949A (en) * 1977-09-13 1979-04-06 Ransburg Japan Ltd Coating apparatus having stroke automatic control device
JPS54105146A (en) * 1978-02-06 1979-08-17 Nat Jutaku Kenzai Applicator

Also Published As

Publication number Publication date
JPS5315936B2 (enrdf_load_stackoverflow) 1978-05-29

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