JPS51108577A - - Google Patents

Info

Publication number
JPS51108577A
JPS51108577A JP50032230A JP3223075A JPS51108577A JP S51108577 A JPS51108577 A JP S51108577A JP 50032230 A JP50032230 A JP 50032230A JP 3223075 A JP3223075 A JP 3223075A JP S51108577 A JPS51108577 A JP S51108577A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50032230A
Other languages
Japanese (ja)
Inventor
Hideki Nishida
Toshio Oku
Masaki Takahashi
Yutaka Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP50032230A priority Critical patent/JPS51108577A/ja
Publication of JPS51108577A publication Critical patent/JPS51108577A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP50032230A 1975-03-19 1975-03-19 Pending JPS51108577A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50032230A JPS51108577A (ko) 1975-03-19 1975-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50032230A JPS51108577A (ko) 1975-03-19 1975-03-19

Publications (1)

Publication Number Publication Date
JPS51108577A true JPS51108577A (ko) 1976-09-25

Family

ID=12353157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50032230A Pending JPS51108577A (ko) 1975-03-19 1975-03-19

Country Status (1)

Country Link
JP (1) JPS51108577A (ko)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5369034A (en) * 1976-11-29 1978-06-20 Du Pont Liquid stacking method
JPS5710232A (en) * 1980-06-23 1982-01-19 Nec Corp Forming method for resist pattern
JPS5754317A (en) * 1980-09-19 1982-03-31 Hitachi Ltd Method and device for forming pattern
JPS6263429A (ja) * 1985-09-13 1987-03-20 Iwatsu Electric Co Ltd レジスト露光方法と装置
JPH0527564A (ja) * 1991-07-23 1993-02-05 Kyocera Corp 画像形成装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4959574A (ko) * 1972-10-05 1974-06-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4959574A (ko) * 1972-10-05 1974-06-10

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5369034A (en) * 1976-11-29 1978-06-20 Du Pont Liquid stacking method
JPS5537738B2 (ko) * 1976-11-29 1980-09-30
JPS5710232A (en) * 1980-06-23 1982-01-19 Nec Corp Forming method for resist pattern
JPS5754317A (en) * 1980-09-19 1982-03-31 Hitachi Ltd Method and device for forming pattern
JPS6346973B2 (ko) * 1980-09-19 1988-09-20 Hitachi Ltd
JPS6263429A (ja) * 1985-09-13 1987-03-20 Iwatsu Electric Co Ltd レジスト露光方法と装置
JPH0527564A (ja) * 1991-07-23 1993-02-05 Kyocera Corp 画像形成装置

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