JPS509598A - - Google Patents
Info
- Publication number
- JPS509598A JPS509598A JP5972173A JP5972173A JPS509598A JP S509598 A JPS509598 A JP S509598A JP 5972173 A JP5972173 A JP 5972173A JP 5972173 A JP5972173 A JP 5972173A JP S509598 A JPS509598 A JP S509598A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5972173A JPS509598A (ja) | 1973-05-30 | 1973-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5972173A JPS509598A (ja) | 1973-05-30 | 1973-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS509598A true JPS509598A (ja) | 1975-01-31 |
Family
ID=13121337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5972173A Pending JPS509598A (ja) | 1973-05-30 | 1973-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS509598A (ja) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53111043A (en) * | 1977-02-22 | 1978-09-28 | Gen Electric | Method for purification of silane and siloxane |
| JPS61228653A (ja) * | 1985-04-02 | 1986-10-11 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
| EP0201919A2 (en) * | 1985-05-16 | 1986-11-20 | Mitsubishi Kasei Corporation | Method for producing monosilane and a tetraalkoxysilane |
| JP2015535802A (ja) * | 2012-10-02 | 2015-12-17 | オーシーアイ カンパニー リミテッド | トリアルコキシシランを用いたモノシランの製造方法 |
| DE102017210544A1 (de) | 2016-06-22 | 2018-01-11 | Mitutoyo Corporation | Laserjustierverfahren und laserquellenvorrichtung |
-
1973
- 1973-05-30 JP JP5972173A patent/JPS509598A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53111043A (en) * | 1977-02-22 | 1978-09-28 | Gen Electric | Method for purification of silane and siloxane |
| JPS6212231B2 (ja) * | 1977-02-22 | 1987-03-17 | Gen Electric | |
| JPS61228653A (ja) * | 1985-04-02 | 1986-10-11 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
| EP0201919A2 (en) * | 1985-05-16 | 1986-11-20 | Mitsubishi Kasei Corporation | Method for producing monosilane and a tetraalkoxysilane |
| JP2015535802A (ja) * | 2012-10-02 | 2015-12-17 | オーシーアイ カンパニー リミテッド | トリアルコキシシランを用いたモノシランの製造方法 |
| DE102017210544A1 (de) | 2016-06-22 | 2018-01-11 | Mitutoyo Corporation | Laserjustierverfahren und laserquellenvorrichtung |