JPS509545A - - Google Patents

Info

Publication number
JPS509545A
JPS509545A JP6028373A JP6028373A JPS509545A JP S509545 A JPS509545 A JP S509545A JP 6028373 A JP6028373 A JP 6028373A JP 6028373 A JP6028373 A JP 6028373A JP S509545 A JPS509545 A JP S509545A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6028373A
Other languages
Japanese (ja)
Other versions
JPS5335779B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6028373A priority Critical patent/JPS5335779B2/ja
Publication of JPS509545A publication Critical patent/JPS509545A/ja
Publication of JPS5335779B2 publication Critical patent/JPS5335779B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Treatment Of Metals (AREA)
  • Coating With Molten Metal (AREA)
  • Electrochemical Coating By Surface Reaction (AREA)
  • Electroplating Methods And Accessories (AREA)
JP6028373A 1973-05-31 1973-05-31 Expired JPS5335779B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6028373A JPS5335779B2 (enrdf_load_stackoverflow) 1973-05-31 1973-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6028373A JPS5335779B2 (enrdf_load_stackoverflow) 1973-05-31 1973-05-31

Publications (2)

Publication Number Publication Date
JPS509545A true JPS509545A (enrdf_load_stackoverflow) 1975-01-31
JPS5335779B2 JPS5335779B2 (enrdf_load_stackoverflow) 1978-09-28

Family

ID=13137653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6028373A Expired JPS5335779B2 (enrdf_load_stackoverflow) 1973-05-31 1973-05-31

Country Status (1)

Country Link
JP (1) JPS5335779B2 (enrdf_load_stackoverflow)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56155535A (en) * 1980-05-02 1981-12-01 Nippon Telegr & Teleph Corp <Ntt> Film forming device utilizing plasma
JPS57123363A (en) * 1981-01-23 1982-07-31 Nat Jutaku Kenzai Footboard for staircase
JPS57203796A (en) * 1981-06-08 1982-12-14 Nippon Steel Corp Surface treatment of zinc plated steel plate
JPS5875839A (ja) * 1981-10-30 1983-05-07 Fujitsu Ltd スパツタ装置
JPS6289882A (ja) * 1985-10-14 1987-04-24 Semiconductor Energy Lab Co Ltd 気相エツチング方法
JPS62124297A (ja) * 1985-11-22 1987-06-05 Sumitomo Metal Ind Ltd 耐食性に優れた表面処理鋼板
JPH02138477A (ja) * 1989-07-14 1990-05-28 Hitachi Ltd マイクロ波プラズマによる膜形成装置、及びその方法
US4947085A (en) * 1987-03-27 1990-08-07 Mitsubishi Denki Kabushiki Kaisha Plasma processor
US4946537A (en) * 1988-07-12 1990-08-07 Tokyo Ohka Kogyo Co., Ltd. Plasma reactor
US5115167A (en) * 1988-04-05 1992-05-19 Mitsubishi Denki Kabushiki Kaisha Plasma processor
JPH07263363A (ja) * 1994-11-28 1995-10-13 Matsushita Electric Ind Co Ltd 薄膜形成方法及びエッチング方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63126249U (enrdf_load_stackoverflow) * 1987-02-09 1988-08-17

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501935A (enrdf_load_stackoverflow) * 1973-05-09 1975-01-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501935A (enrdf_load_stackoverflow) * 1973-05-09 1975-01-10

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56155535A (en) * 1980-05-02 1981-12-01 Nippon Telegr & Teleph Corp <Ntt> Film forming device utilizing plasma
JPS57123363A (en) * 1981-01-23 1982-07-31 Nat Jutaku Kenzai Footboard for staircase
JPS57203796A (en) * 1981-06-08 1982-12-14 Nippon Steel Corp Surface treatment of zinc plated steel plate
JPS5875839A (ja) * 1981-10-30 1983-05-07 Fujitsu Ltd スパツタ装置
JPS6289882A (ja) * 1985-10-14 1987-04-24 Semiconductor Energy Lab Co Ltd 気相エツチング方法
JPS62124297A (ja) * 1985-11-22 1987-06-05 Sumitomo Metal Ind Ltd 耐食性に優れた表面処理鋼板
US4947085A (en) * 1987-03-27 1990-08-07 Mitsubishi Denki Kabushiki Kaisha Plasma processor
US5115167A (en) * 1988-04-05 1992-05-19 Mitsubishi Denki Kabushiki Kaisha Plasma processor
US4946537A (en) * 1988-07-12 1990-08-07 Tokyo Ohka Kogyo Co., Ltd. Plasma reactor
JPH02138477A (ja) * 1989-07-14 1990-05-28 Hitachi Ltd マイクロ波プラズマによる膜形成装置、及びその方法
JPH07263363A (ja) * 1994-11-28 1995-10-13 Matsushita Electric Ind Co Ltd 薄膜形成方法及びエッチング方法

Also Published As

Publication number Publication date
JPS5335779B2 (enrdf_load_stackoverflow) 1978-09-28

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