JPS509545A - - Google Patents
Info
- Publication number
- JPS509545A JPS509545A JP6028373A JP6028373A JPS509545A JP S509545 A JPS509545 A JP S509545A JP 6028373 A JP6028373 A JP 6028373A JP 6028373 A JP6028373 A JP 6028373A JP S509545 A JPS509545 A JP S509545A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrochemical Coating By Surface Reaction (AREA)
- Electroplating Methods And Accessories (AREA)
- Chemical Treatment Of Metals (AREA)
- Coating With Molten Metal (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6028373A JPS5335779B2 (de) | 1973-05-31 | 1973-05-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6028373A JPS5335779B2 (de) | 1973-05-31 | 1973-05-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS509545A true JPS509545A (de) | 1975-01-31 |
JPS5335779B2 JPS5335779B2 (de) | 1978-09-28 |
Family
ID=13137653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6028373A Expired JPS5335779B2 (de) | 1973-05-31 | 1973-05-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5335779B2 (de) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56155535A (en) * | 1980-05-02 | 1981-12-01 | Nippon Telegr & Teleph Corp <Ntt> | Film forming device utilizing plasma |
JPS57123363A (en) * | 1981-01-23 | 1982-07-31 | Nat Jutaku Kenzai | Footboard for staircase |
JPS57203796A (en) * | 1981-06-08 | 1982-12-14 | Nippon Steel Corp | Surface treatment of zinc plated steel plate |
JPS5875839A (ja) * | 1981-10-30 | 1983-05-07 | Fujitsu Ltd | スパツタ装置 |
JPS6289882A (ja) * | 1985-10-14 | 1987-04-24 | Semiconductor Energy Lab Co Ltd | 気相エツチング方法 |
JPS62124297A (ja) * | 1985-11-22 | 1987-06-05 | Sumitomo Metal Ind Ltd | 耐食性に優れた表面処理鋼板 |
JPH02138477A (ja) * | 1989-07-14 | 1990-05-28 | Hitachi Ltd | マイクロ波プラズマによる膜形成装置、及びその方法 |
US4946537A (en) * | 1988-07-12 | 1990-08-07 | Tokyo Ohka Kogyo Co., Ltd. | Plasma reactor |
US4947085A (en) * | 1987-03-27 | 1990-08-07 | Mitsubishi Denki Kabushiki Kaisha | Plasma processor |
US5115167A (en) * | 1988-04-05 | 1992-05-19 | Mitsubishi Denki Kabushiki Kaisha | Plasma processor |
JPH07263363A (ja) * | 1994-11-28 | 1995-10-13 | Matsushita Electric Ind Co Ltd | 薄膜形成方法及びエッチング方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63126249U (de) * | 1987-02-09 | 1988-08-17 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS501935A (de) * | 1973-05-09 | 1975-01-10 |
-
1973
- 1973-05-31 JP JP6028373A patent/JPS5335779B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS501935A (de) * | 1973-05-09 | 1975-01-10 |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6243335B2 (de) * | 1980-05-02 | 1987-09-12 | Nippon Telegraph & Telephone | |
JPS56155535A (en) * | 1980-05-02 | 1981-12-01 | Nippon Telegr & Teleph Corp <Ntt> | Film forming device utilizing plasma |
JPS57123363A (en) * | 1981-01-23 | 1982-07-31 | Nat Jutaku Kenzai | Footboard for staircase |
JPS57203796A (en) * | 1981-06-08 | 1982-12-14 | Nippon Steel Corp | Surface treatment of zinc plated steel plate |
JPS5930788B2 (ja) * | 1981-06-08 | 1984-07-28 | 新日本製鐵株式会社 | 亜鉛メツキ鋼板の表面処理方法 |
JPS6364894B2 (de) * | 1981-10-30 | 1988-12-14 | ||
JPS5875839A (ja) * | 1981-10-30 | 1983-05-07 | Fujitsu Ltd | スパツタ装置 |
JPS6289882A (ja) * | 1985-10-14 | 1987-04-24 | Semiconductor Energy Lab Co Ltd | 気相エツチング方法 |
JPS6344827B2 (de) * | 1985-10-14 | 1988-09-07 | Handotai Energy Kenkyusho | |
JPS62124297A (ja) * | 1985-11-22 | 1987-06-05 | Sumitomo Metal Ind Ltd | 耐食性に優れた表面処理鋼板 |
US4947085A (en) * | 1987-03-27 | 1990-08-07 | Mitsubishi Denki Kabushiki Kaisha | Plasma processor |
US5115167A (en) * | 1988-04-05 | 1992-05-19 | Mitsubishi Denki Kabushiki Kaisha | Plasma processor |
US4946537A (en) * | 1988-07-12 | 1990-08-07 | Tokyo Ohka Kogyo Co., Ltd. | Plasma reactor |
JPH02138477A (ja) * | 1989-07-14 | 1990-05-28 | Hitachi Ltd | マイクロ波プラズマによる膜形成装置、及びその方法 |
JPH07263363A (ja) * | 1994-11-28 | 1995-10-13 | Matsushita Electric Ind Co Ltd | 薄膜形成方法及びエッチング方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5335779B2 (de) | 1978-09-28 |