JPS5091460U - - Google Patents

Info

Publication number
JPS5091460U
JPS5091460U JP1974003320U JP332074U JPS5091460U JP S5091460 U JPS5091460 U JP S5091460U JP 1974003320 U JP1974003320 U JP 1974003320U JP 332074 U JP332074 U JP 332074U JP S5091460 U JPS5091460 U JP S5091460U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1974003320U
Other languages
Japanese (ja)
Other versions
JPS5342458Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974003320U priority Critical patent/JPS5342458Y2/ja
Publication of JPS5091460U publication Critical patent/JPS5091460U/ja
Application granted granted Critical
Publication of JPS5342458Y2 publication Critical patent/JPS5342458Y2/ja
Expired legal-status Critical Current

Links

JP1974003320U 1973-12-24 1973-12-24 Expired JPS5342458Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974003320U JPS5342458Y2 (en) 1973-12-24 1973-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974003320U JPS5342458Y2 (en) 1973-12-24 1973-12-24

Publications (2)

Publication Number Publication Date
JPS5091460U true JPS5091460U (en) 1975-08-01
JPS5342458Y2 JPS5342458Y2 (en) 1978-10-13

Family

ID=28062832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974003320U Expired JPS5342458Y2 (en) 1973-12-24 1973-12-24

Country Status (1)

Country Link
JP (1) JPS5342458Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364463A (en) * 1976-11-22 1978-06-08 Nippon Telegr & Teleph Corp <Ntt> Fixing tray of semiconductor wafers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364463A (en) * 1976-11-22 1978-06-08 Nippon Telegr & Teleph Corp <Ntt> Fixing tray of semiconductor wafers

Also Published As

Publication number Publication date
JPS5342458Y2 (en) 1978-10-13

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