JPS5091273A - - Google Patents

Info

Publication number
JPS5091273A
JPS5091273A JP48137742A JP13774273A JPS5091273A JP S5091273 A JPS5091273 A JP S5091273A JP 48137742 A JP48137742 A JP 48137742A JP 13774273 A JP13774273 A JP 13774273A JP S5091273 A JPS5091273 A JP S5091273A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48137742A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48137742A priority Critical patent/JPS5091273A/ja
Publication of JPS5091273A publication Critical patent/JPS5091273A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP48137742A 1973-12-12 1973-12-12 Pending JPS5091273A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48137742A JPS5091273A (ja) 1973-12-12 1973-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48137742A JPS5091273A (ja) 1973-12-12 1973-12-12

Publications (1)

Publication Number Publication Date
JPS5091273A true JPS5091273A (ja) 1975-07-21

Family

ID=15205756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48137742A Pending JPS5091273A (ja) 1973-12-12 1973-12-12

Country Status (1)

Country Link
JP (1) JPS5091273A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55164840U (ja) * 1979-05-14 1980-11-27
JPS59130424A (ja) * 1983-12-12 1984-07-27 Hitachi Ltd フオトマスク形成方法
JPS6016423A (ja) * 1984-04-16 1985-01-28 Hitachi Ltd 文字記号形成法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55164840U (ja) * 1979-05-14 1980-11-27
JPS59130424A (ja) * 1983-12-12 1984-07-27 Hitachi Ltd フオトマスク形成方法
JPS6016423A (ja) * 1984-04-16 1985-01-28 Hitachi Ltd 文字記号形成法

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