JPS5091273A - - Google Patents
Info
- Publication number
- JPS5091273A JPS5091273A JP48137742A JP13774273A JPS5091273A JP S5091273 A JPS5091273 A JP S5091273A JP 48137742 A JP48137742 A JP 48137742A JP 13774273 A JP13774273 A JP 13774273A JP S5091273 A JPS5091273 A JP S5091273A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP48137742A JPS5091273A (ja) | 1973-12-12 | 1973-12-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP48137742A JPS5091273A (ja) | 1973-12-12 | 1973-12-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5091273A true JPS5091273A (ja) | 1975-07-21 |
Family
ID=15205756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP48137742A Pending JPS5091273A (ja) | 1973-12-12 | 1973-12-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5091273A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55164840U (ja) * | 1979-05-14 | 1980-11-27 | ||
JPS59130424A (ja) * | 1983-12-12 | 1984-07-27 | Hitachi Ltd | フオトマスク形成方法 |
JPS6016423A (ja) * | 1984-04-16 | 1985-01-28 | Hitachi Ltd | 文字記号形成法 |
-
1973
- 1973-12-12 JP JP48137742A patent/JPS5091273A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55164840U (ja) * | 1979-05-14 | 1980-11-27 | ||
JPS59130424A (ja) * | 1983-12-12 | 1984-07-27 | Hitachi Ltd | フオトマスク形成方法 |
JPS6016423A (ja) * | 1984-04-16 | 1985-01-28 | Hitachi Ltd | 文字記号形成法 |