JPS5091254A - - Google Patents

Info

Publication number
JPS5091254A
JPS5091254A JP13773873A JP13773873A JPS5091254A JP S5091254 A JPS5091254 A JP S5091254A JP 13773873 A JP13773873 A JP 13773873A JP 13773873 A JP13773873 A JP 13773873A JP S5091254 A JPS5091254 A JP S5091254A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13773873A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13773873A priority Critical patent/JPS5091254A/ja
Publication of JPS5091254A publication Critical patent/JPS5091254A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP13773873A 1973-12-12 1973-12-12 Pending JPS5091254A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13773873A JPS5091254A (ja) 1973-12-12 1973-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13773873A JPS5091254A (ja) 1973-12-12 1973-12-12

Publications (1)

Publication Number Publication Date
JPS5091254A true JPS5091254A (ja) 1975-07-21

Family

ID=15205663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13773873A Pending JPS5091254A (ja) 1973-12-12 1973-12-12

Country Status (1)

Country Link
JP (1) JPS5091254A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619620A (en) * 1979-07-26 1981-02-24 Fujitsu Ltd Epitaxial growing method
JPS58128930U (ja) * 1982-02-22 1983-09-01 株式会社東芝 成膜装置
JPH08162423A (ja) * 1994-11-30 1996-06-21 Shinetsu Quartz Prod Co Ltd 枚葉式ウエーハ熱処理装置とその装置に用いる反応容器の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619620A (en) * 1979-07-26 1981-02-24 Fujitsu Ltd Epitaxial growing method
JPS58128930U (ja) * 1982-02-22 1983-09-01 株式会社東芝 成膜装置
JPH08162423A (ja) * 1994-11-30 1996-06-21 Shinetsu Quartz Prod Co Ltd 枚葉式ウエーハ熱処理装置とその装置に用いる反応容器の製造方法

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