JPS5087781A - - Google Patents

Info

Publication number
JPS5087781A
JPS5087781A JP13613273A JP13613273A JPS5087781A JP S5087781 A JPS5087781 A JP S5087781A JP 13613273 A JP13613273 A JP 13613273A JP 13613273 A JP13613273 A JP 13613273A JP S5087781 A JPS5087781 A JP S5087781A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13613273A
Other languages
Japanese (ja)
Other versions
JPS5338158B2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13613273A priority Critical patent/JPS5338158B2/ja
Publication of JPS5087781A publication Critical patent/JPS5087781A/ja
Publication of JPS5338158B2 publication Critical patent/JPS5338158B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP13613273A 1973-12-07 1973-12-07 Expired JPS5338158B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13613273A JPS5338158B2 (fr) 1973-12-07 1973-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13613273A JPS5338158B2 (fr) 1973-12-07 1973-12-07

Publications (2)

Publication Number Publication Date
JPS5087781A true JPS5087781A (fr) 1975-07-15
JPS5338158B2 JPS5338158B2 (fr) 1978-10-13

Family

ID=15168043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13613273A Expired JPS5338158B2 (fr) 1973-12-07 1973-12-07

Country Status (1)

Country Link
JP (1) JPS5338158B2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333582A (en) * 1976-09-10 1978-03-29 Hitachi Ltd Production of semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6210870U (fr) * 1985-07-03 1987-01-23

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333582A (en) * 1976-09-10 1978-03-29 Hitachi Ltd Production of semiconductor device
JPS6019146B2 (ja) * 1976-09-10 1985-05-14 株式会社日立製作所 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5338158B2 (fr) 1978-10-13

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