JPS5338158B2 - - Google Patents
Info
- Publication number
- JPS5338158B2 JPS5338158B2 JP13613273A JP13613273A JPS5338158B2 JP S5338158 B2 JPS5338158 B2 JP S5338158B2 JP 13613273 A JP13613273 A JP 13613273A JP 13613273 A JP13613273 A JP 13613273A JP S5338158 B2 JPS5338158 B2 JP S5338158B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13613273A JPS5338158B2 (fr) | 1973-12-07 | 1973-12-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13613273A JPS5338158B2 (fr) | 1973-12-07 | 1973-12-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5087781A JPS5087781A (fr) | 1975-07-15 |
JPS5338158B2 true JPS5338158B2 (fr) | 1978-10-13 |
Family
ID=15168043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13613273A Expired JPS5338158B2 (fr) | 1973-12-07 | 1973-12-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5338158B2 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6210870U (fr) * | 1985-07-03 | 1987-01-23 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6019146B2 (ja) * | 1976-09-10 | 1985-05-14 | 株式会社日立製作所 | 半導体装置の製造方法 |
-
1973
- 1973-12-07 JP JP13613273A patent/JPS5338158B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6210870U (fr) * | 1985-07-03 | 1987-01-23 |
Also Published As
Publication number | Publication date |
---|---|
JPS5087781A (fr) | 1975-07-15 |