JPS5087589A - - Google Patents
Info
- Publication number
- JPS5087589A JPS5087589A JP13752773A JP13752773A JPS5087589A JP S5087589 A JPS5087589 A JP S5087589A JP 13752773 A JP13752773 A JP 13752773A JP 13752773 A JP13752773 A JP 13752773A JP S5087589 A JPS5087589 A JP S5087589A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13752773A JPS5212546B2 (de) | 1973-12-06 | 1973-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13752773A JPS5212546B2 (de) | 1973-12-06 | 1973-12-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5087589A true JPS5087589A (de) | 1975-07-14 |
| JPS5212546B2 JPS5212546B2 (de) | 1977-04-07 |
Family
ID=15200750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13752773A Expired JPS5212546B2 (de) | 1973-12-06 | 1973-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5212546B2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003318180A (ja) * | 2002-04-23 | 2003-11-07 | Hewlett Packard Co <Hp> | サブリソグラフィサイズの線および空間パターンを形成する方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004351449A (ja) * | 2003-05-28 | 2004-12-16 | Komatsu Sanki Kk | プラズマ切断装置及びそれの制御装置 |
-
1973
- 1973-12-06 JP JP13752773A patent/JPS5212546B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003318180A (ja) * | 2002-04-23 | 2003-11-07 | Hewlett Packard Co <Hp> | サブリソグラフィサイズの線および空間パターンを形成する方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5212546B2 (de) | 1977-04-07 |