JPS5087589A - - Google Patents

Info

Publication number
JPS5087589A
JPS5087589A JP13752773A JP13752773A JPS5087589A JP S5087589 A JPS5087589 A JP S5087589A JP 13752773 A JP13752773 A JP 13752773A JP 13752773 A JP13752773 A JP 13752773A JP S5087589 A JPS5087589 A JP S5087589A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13752773A
Other languages
Japanese (ja)
Other versions
JPS5212546B2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13752773A priority Critical patent/JPS5212546B2/ja
Publication of JPS5087589A publication Critical patent/JPS5087589A/ja
Publication of JPS5212546B2 publication Critical patent/JPS5212546B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP13752773A 1973-12-06 1973-12-06 Expired JPS5212546B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13752773A JPS5212546B2 (de) 1973-12-06 1973-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13752773A JPS5212546B2 (de) 1973-12-06 1973-12-06

Publications (2)

Publication Number Publication Date
JPS5087589A true JPS5087589A (de) 1975-07-14
JPS5212546B2 JPS5212546B2 (de) 1977-04-07

Family

ID=15200750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13752773A Expired JPS5212546B2 (de) 1973-12-06 1973-12-06

Country Status (1)

Country Link
JP (1) JPS5212546B2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003318180A (ja) * 2002-04-23 2003-11-07 Hewlett Packard Co <Hp> サブリソグラフィサイズの線および空間パターンを形成する方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004351449A (ja) * 2003-05-28 2004-12-16 Komatsu Sanki Kk プラズマ切断装置及びそれの制御装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003318180A (ja) * 2002-04-23 2003-11-07 Hewlett Packard Co <Hp> サブリソグラフィサイズの線および空間パターンを形成する方法

Also Published As

Publication number Publication date
JPS5212546B2 (de) 1977-04-07

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