JPS5212546B2 - - Google Patents

Info

Publication number
JPS5212546B2
JPS5212546B2 JP13752773A JP13752773A JPS5212546B2 JP S5212546 B2 JPS5212546 B2 JP S5212546B2 JP 13752773 A JP13752773 A JP 13752773A JP 13752773 A JP13752773 A JP 13752773A JP S5212546 B2 JPS5212546 B2 JP S5212546B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13752773A
Other languages
Japanese (ja)
Other versions
JPS5087589A (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13752773A priority Critical patent/JPS5212546B2/ja
Publication of JPS5087589A publication Critical patent/JPS5087589A/ja
Publication of JPS5212546B2 publication Critical patent/JPS5212546B2/ja
Expired legal-status Critical Current

Links

JP13752773A 1973-12-06 1973-12-06 Expired JPS5212546B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13752773A JPS5212546B2 (de) 1973-12-06 1973-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13752773A JPS5212546B2 (de) 1973-12-06 1973-12-06

Publications (2)

Publication Number Publication Date
JPS5087589A JPS5087589A (de) 1975-07-14
JPS5212546B2 true JPS5212546B2 (de) 1977-04-07

Family

ID=15200750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13752773A Expired JPS5212546B2 (de) 1973-12-06 1973-12-06

Country Status (1)

Country Link
JP (1) JPS5212546B2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1304159C (zh) * 2003-05-28 2007-03-14 小松产机株式会社 等离子切割装置及其控制装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6759180B2 (en) * 2002-04-23 2004-07-06 Hewlett-Packard Development Company, L.P. Method of fabricating sub-lithographic sized line and space patterns for nano-imprinting lithography

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1304159C (zh) * 2003-05-28 2007-03-14 小松产机株式会社 等离子切割装置及其控制装置

Also Published As

Publication number Publication date
JPS5087589A (de) 1975-07-14

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