JPS508131A - - Google Patents

Info

Publication number
JPS508131A
JPS508131A JP48058676A JP5867673A JPS508131A JP S508131 A JPS508131 A JP S508131A JP 48058676 A JP48058676 A JP 48058676A JP 5867673 A JP5867673 A JP 5867673A JP S508131 A JPS508131 A JP S508131A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48058676A
Other languages
Japanese (ja)
Other versions
JPS5323543B2 (show.php
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5867673A priority Critical patent/JPS5323543B2/ja
Publication of JPS508131A publication Critical patent/JPS508131A/ja
Publication of JPS5323543B2 publication Critical patent/JPS5323543B2/ja
Expired legal-status Critical Current

Links

JP5867673A 1973-05-28 1973-05-28 Expired JPS5323543B2 (show.php)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5867673A JPS5323543B2 (show.php) 1973-05-28 1973-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5867673A JPS5323543B2 (show.php) 1973-05-28 1973-05-28

Publications (2)

Publication Number Publication Date
JPS508131A true JPS508131A (show.php) 1975-01-28
JPS5323543B2 JPS5323543B2 (show.php) 1978-07-15

Family

ID=13091168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5867673A Expired JPS5323543B2 (show.php) 1973-05-28 1973-05-28

Country Status (1)

Country Link
JP (1) JPS5323543B2 (show.php)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51142741A (en) * 1975-06-04 1976-12-08 Hitachi Ltd Refrigeration cycle
JPS5252148U (show.php) * 1975-10-13 1977-04-14
JPS5252255A (en) * 1975-10-24 1977-04-26 Hitachi Ltd Refrigerant flow control system
JPS5449663A (en) * 1977-09-26 1979-04-19 Sanyo Electric Co Ltd Coolant-noise reducing apparatus
JPH02166366A (ja) * 1988-12-20 1990-06-27 Matsushita Refrig Co Ltd 冷媒分流器
JPH02275266A (ja) * 1989-04-17 1990-11-09 Matsushita Refrig Co Ltd 冷媒分流器
JPH02306070A (ja) * 1989-05-19 1990-12-19 Matsushita Refrig Co Ltd 冷媒分流器
JPH0379973A (ja) * 1989-08-18 1991-04-04 Matsushita Refrig Co Ltd 分流器
CN1304247C (zh) * 2003-09-26 2007-03-14 夏普株式会社 基片容纳托盘平板架及基片传送系统

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51142741A (en) * 1975-06-04 1976-12-08 Hitachi Ltd Refrigeration cycle
JPS5252148U (show.php) * 1975-10-13 1977-04-14
JPS5252255A (en) * 1975-10-24 1977-04-26 Hitachi Ltd Refrigerant flow control system
JPS5449663A (en) * 1977-09-26 1979-04-19 Sanyo Electric Co Ltd Coolant-noise reducing apparatus
JPH02166366A (ja) * 1988-12-20 1990-06-27 Matsushita Refrig Co Ltd 冷媒分流器
JPH02275266A (ja) * 1989-04-17 1990-11-09 Matsushita Refrig Co Ltd 冷媒分流器
JPH02306070A (ja) * 1989-05-19 1990-12-19 Matsushita Refrig Co Ltd 冷媒分流器
JPH0379973A (ja) * 1989-08-18 1991-04-04 Matsushita Refrig Co Ltd 分流器
CN1304247C (zh) * 2003-09-26 2007-03-14 夏普株式会社 基片容纳托盘平板架及基片传送系统

Also Published As

Publication number Publication date
JPS5323543B2 (show.php) 1978-07-15

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