JPS5080980A - - Google Patents
Info
- Publication number
- JPS5080980A JPS5080980A JP13079873A JP13079873A JPS5080980A JP S5080980 A JPS5080980 A JP S5080980A JP 13079873 A JP13079873 A JP 13079873A JP 13079873 A JP13079873 A JP 13079873A JP S5080980 A JPS5080980 A JP S5080980A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13079873A JPS5080980A (ja) | 1973-11-22 | 1973-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13079873A JPS5080980A (ja) | 1973-11-22 | 1973-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5080980A true JPS5080980A (ja) | 1975-07-01 |
Family
ID=15042936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13079873A Pending JPS5080980A (ja) | 1973-11-22 | 1973-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5080980A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06122966A (ja) * | 1992-10-08 | 1994-05-06 | Naosuke Adachi | 真空蒸着装置 |
| JP2002343563A (ja) * | 2001-05-15 | 2002-11-29 | Sony Corp | 真空成膜方法および真空成膜装置 |
-
1973
- 1973-11-22 JP JP13079873A patent/JPS5080980A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06122966A (ja) * | 1992-10-08 | 1994-05-06 | Naosuke Adachi | 真空蒸着装置 |
| JP2002343563A (ja) * | 2001-05-15 | 2002-11-29 | Sony Corp | 真空成膜方法および真空成膜装置 |