JPS5080758A - - Google Patents
Info
- Publication number
- JPS5080758A JPS5080758A JP12725873A JP12725873A JPS5080758A JP S5080758 A JPS5080758 A JP S5080758A JP 12725873 A JP12725873 A JP 12725873A JP 12725873 A JP12725873 A JP 12725873A JP S5080758 A JPS5080758 A JP S5080758A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12725873A JPS5080758A (ja) | 1973-11-14 | 1973-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12725873A JPS5080758A (ja) | 1973-11-14 | 1973-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5080758A true JPS5080758A (ja) | 1975-07-01 |
Family
ID=14955583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12725873A Pending JPS5080758A (ja) | 1973-11-14 | 1973-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5080758A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58128930U (ja) * | 1982-02-22 | 1983-09-01 | 株式会社東芝 | 成膜装置 |
-
1973
- 1973-11-14 JP JP12725873A patent/JPS5080758A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58128930U (ja) * | 1982-02-22 | 1983-09-01 | 株式会社東芝 | 成膜装置 |