JPS5075772A - - Google Patents
Info
- Publication number
- JPS5075772A JPS5075772A JP48124383A JP12438373A JPS5075772A JP S5075772 A JPS5075772 A JP S5075772A JP 48124383 A JP48124383 A JP 48124383A JP 12438373 A JP12438373 A JP 12438373A JP S5075772 A JPS5075772 A JP S5075772A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48124383A JPS5075772A (ja) | 1973-11-07 | 1973-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48124383A JPS5075772A (ja) | 1973-11-07 | 1973-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5075772A true JPS5075772A (ja) | 1975-06-21 |
Family
ID=14884037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48124383A Pending JPS5075772A (ja) | 1973-11-07 | 1973-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5075772A (ja) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5381083A (en) * | 1976-12-27 | 1978-07-18 | Fujitsu Ltd | Focusing method of projection exposure apparatus |
| JPS5764921A (en) * | 1980-10-08 | 1982-04-20 | Toshiba Corp | Manufacture of gaas integrated circuit |
| JPS6351631A (ja) * | 1986-08-20 | 1988-03-04 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
| JPH01132121A (ja) * | 1987-11-18 | 1989-05-24 | Canon Inc | 半導体装置の製造方法 |
| JPH01218019A (ja) * | 1988-02-26 | 1989-08-31 | Mitsubishi Electric Corp | アライメントマークが形成された半導体基板 |
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1973
- 1973-11-07 JP JP48124383A patent/JPS5075772A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5381083A (en) * | 1976-12-27 | 1978-07-18 | Fujitsu Ltd | Focusing method of projection exposure apparatus |
| JPS5764921A (en) * | 1980-10-08 | 1982-04-20 | Toshiba Corp | Manufacture of gaas integrated circuit |
| JPS6351631A (ja) * | 1986-08-20 | 1988-03-04 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
| JPH01132121A (ja) * | 1987-11-18 | 1989-05-24 | Canon Inc | 半導体装置の製造方法 |
| JPH01218019A (ja) * | 1988-02-26 | 1989-08-31 | Mitsubishi Electric Corp | アライメントマークが形成された半導体基板 |