JPS5074578A - - Google Patents

Info

Publication number
JPS5074578A
JPS5074578A JP12467873A JP12467873A JPS5074578A JP S5074578 A JPS5074578 A JP S5074578A JP 12467873 A JP12467873 A JP 12467873A JP 12467873 A JP12467873 A JP 12467873A JP S5074578 A JPS5074578 A JP S5074578A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12467873A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12467873A priority Critical patent/JPS5074578A/ja
Publication of JPS5074578A publication Critical patent/JPS5074578A/ja
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
JP12467873A 1973-11-05 1973-11-05 Pending JPS5074578A (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12467873A JPS5074578A (it) 1973-11-05 1973-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12467873A JPS5074578A (it) 1973-11-05 1973-11-05

Publications (1)

Publication Number Publication Date
JPS5074578A true JPS5074578A (it) 1975-06-19

Family

ID=14891349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12467873A Pending JPS5074578A (it) 1973-11-05 1973-11-05

Country Status (1)

Country Link
JP (1) JPS5074578A (it)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221282A (en) * 1975-08-12 1977-02-17 Denki Kagaku Kogyo Kk Heater for vacuum evaporation having resistance against corrosion
JPS5221278A (en) * 1975-08-12 1977-02-17 Denki Kagaku Kogyo Kk Heater for vacuum evaporation having resistance against corrosion
JPS5221280A (en) * 1975-08-12 1977-02-17 Denki Kagaku Kogyo Kk Heater for vacuum evaporation having resistance against corrosion
JPS5221279A (en) * 1975-08-12 1977-02-17 Denki Kagaku Kogyo Kk Heater for vacuum evaporation having resistance against corrosion
JPS5221281A (en) * 1975-08-12 1977-02-17 Denki Kagaku Kogyo Kk Heater for vacuum evaporation having resistance against corrosion

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221282A (en) * 1975-08-12 1977-02-17 Denki Kagaku Kogyo Kk Heater for vacuum evaporation having resistance against corrosion
JPS5221278A (en) * 1975-08-12 1977-02-17 Denki Kagaku Kogyo Kk Heater for vacuum evaporation having resistance against corrosion
JPS5221280A (en) * 1975-08-12 1977-02-17 Denki Kagaku Kogyo Kk Heater for vacuum evaporation having resistance against corrosion
JPS5221279A (en) * 1975-08-12 1977-02-17 Denki Kagaku Kogyo Kk Heater for vacuum evaporation having resistance against corrosion
JPS5221281A (en) * 1975-08-12 1977-02-17 Denki Kagaku Kogyo Kk Heater for vacuum evaporation having resistance against corrosion
JPS5752954B2 (it) * 1975-08-12 1982-11-10

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