JPS5073684A - - Google Patents
Info
- Publication number
- JPS5073684A JPS5073684A JP49097461A JP9746174A JPS5073684A JP S5073684 A JPS5073684 A JP S5073684A JP 49097461 A JP49097461 A JP 49097461A JP 9746174 A JP9746174 A JP 9746174A JP S5073684 A JPS5073684 A JP S5073684A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
Landscapes
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US00391392A US3839655A (en) | 1973-08-24 | 1973-08-24 | Bayard-alpert vacuum ionization tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5073684A true JPS5073684A (en) | 1975-06-17 |
Family
ID=23546407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49097461A Pending JPS5073684A (en) | 1973-08-24 | 1974-08-24 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3839655A (en) |
| JP (1) | JPS5073684A (en) |
| DE (1) | DE2440090A1 (en) |
| FR (1) | FR2241779B3 (en) |
| IT (1) | IT1020185B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5991330A (en) * | 1982-11-17 | 1984-05-26 | Ulvac Corp | Insulating type ionization gage |
| JPH01143928A (en) * | 1987-11-30 | 1989-06-06 | Tokuda Seisakusho Ltd | Ion gauge |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4636680A (en) * | 1983-05-24 | 1987-01-13 | Granville-Phillips Company | Vacuum gauge |
| US5422573A (en) * | 1990-04-11 | 1995-06-06 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
| US5128617A (en) * | 1990-04-11 | 1992-07-07 | Granville-Phillips Company | Ionization vacuum gauge with emission of electrons in parallel paths |
| US5250906A (en) * | 1991-10-17 | 1993-10-05 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
| US5296817A (en) * | 1990-04-11 | 1994-03-22 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
| DE9116476U1 (en) * | 1991-04-16 | 1992-12-24 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften Ev, 3400 Goettingen, De | |
| JP3069975B2 (en) * | 1991-09-06 | 2000-07-24 | アネルバ株式会社 | Ionization gauge |
| CA2288798A1 (en) | 1997-05-09 | 1998-11-12 | The Fredericks Company | Bayard-alpert vacuum gauge with neutralization of x-ray effect |
| DE102005010716A1 (en) * | 2005-03-09 | 2006-09-14 | Inficon Gmbh | Cold cathode pressure sensor |
| DK2800960T3 (en) | 2012-02-08 | 2019-01-28 | Mks Instr Inc | Ionization meter for high pressure operation |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3743876A (en) * | 1969-10-07 | 1973-07-03 | Canadian Patents Dev | Hot-cathode ionization gauge having electrode means for shaping the electric field in the vicinity of the cathode |
-
1973
- 1973-08-24 US US00391392A patent/US3839655A/en not_active Expired - Lifetime
-
1974
- 1974-08-21 DE DE2440090A patent/DE2440090A1/en active Pending
- 1974-08-24 JP JP49097461A patent/JPS5073684A/ja active Pending
- 1974-08-26 FR FR7429162A patent/FR2241779B3/fr not_active Expired
- 1974-08-26 IT IT26594/74A patent/IT1020185B/en active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5991330A (en) * | 1982-11-17 | 1984-05-26 | Ulvac Corp | Insulating type ionization gage |
| JPH01143928A (en) * | 1987-11-30 | 1989-06-06 | Tokuda Seisakusho Ltd | Ion gauge |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2440090A1 (en) | 1975-02-27 |
| FR2241779A1 (en) | 1975-03-21 |
| IT1020185B (en) | 1977-12-20 |
| US3839655A (en) | 1974-10-01 |
| FR2241779B3 (en) | 1976-03-19 |