JPS5073174A - - Google Patents

Info

Publication number
JPS5073174A
JPS5073174A JP48122737A JP12273773A JPS5073174A JP S5073174 A JPS5073174 A JP S5073174A JP 48122737 A JP48122737 A JP 48122737A JP 12273773 A JP12273773 A JP 12273773A JP S5073174 A JPS5073174 A JP S5073174A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48122737A
Other versions
JPS5439908B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12273773A priority Critical patent/JPS5439908B2/ja
Publication of JPS5073174A publication Critical patent/JPS5073174A/ja
Publication of JPS5439908B2 publication Critical patent/JPS5439908B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP12273773A 1973-11-02 1973-11-02 Expired JPS5439908B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12273773A JPS5439908B2 (ja) 1973-11-02 1973-11-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12273773A JPS5439908B2 (ja) 1973-11-02 1973-11-02

Publications (2)

Publication Number Publication Date
JPS5073174A true JPS5073174A (ja) 1975-06-17
JPS5439908B2 JPS5439908B2 (ja) 1979-11-30

Family

ID=14843332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12273773A Expired JPS5439908B2 (ja) 1973-11-02 1973-11-02

Country Status (1)

Country Link
JP (1) JPS5439908B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632484U (ja) * 1979-08-22 1981-03-30
JPS6246520A (ja) * 1985-08-23 1987-02-28 Mitsubishi Electric Corp 露光装置
JPS63144635U (ja) * 1987-03-13 1988-09-22

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632484U (ja) * 1979-08-22 1981-03-30
JPS6246520A (ja) * 1985-08-23 1987-02-28 Mitsubishi Electric Corp 露光装置
JPS63144635U (ja) * 1987-03-13 1988-09-22

Also Published As

Publication number Publication date
JPS5439908B2 (ja) 1979-11-30

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