JPS5068067A - - Google Patents
Info
- Publication number
- JPS5068067A JPS5068067A JP11578473A JP11578473A JPS5068067A JP S5068067 A JPS5068067 A JP S5068067A JP 11578473 A JP11578473 A JP 11578473A JP 11578473 A JP11578473 A JP 11578473A JP S5068067 A JPS5068067 A JP S5068067A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11578473A JPS5068067A (en) | 1973-10-17 | 1973-10-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11578473A JPS5068067A (en) | 1973-10-17 | 1973-10-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5068067A true JPS5068067A (en) | 1975-06-07 |
Family
ID=14670966
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11578473A Pending JPS5068067A (en) | 1973-10-17 | 1973-10-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5068067A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5288967U (en) * | 1975-12-26 | 1977-07-02 | ||
JPS61183528U (en) * | 1985-05-09 | 1986-11-15 | ||
JPH0223620A (en) * | 1988-07-12 | 1990-01-25 | Mitsubishi Electric Corp | Washing method and washer |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4932857U (en) * | 1972-06-26 | 1974-03-22 |
-
1973
- 1973-10-17 JP JP11578473A patent/JPS5068067A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4932857U (en) * | 1972-06-26 | 1974-03-22 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5288967U (en) * | 1975-12-26 | 1977-07-02 | ||
JPS61183528U (en) * | 1985-05-09 | 1986-11-15 | ||
JPH0238439Y2 (en) * | 1985-05-09 | 1990-10-17 | ||
JPH0223620A (en) * | 1988-07-12 | 1990-01-25 | Mitsubishi Electric Corp | Washing method and washer |