JPS5068067A - - Google Patents

Info

Publication number
JPS5068067A
JPS5068067A JP11578473A JP11578473A JPS5068067A JP S5068067 A JPS5068067 A JP S5068067A JP 11578473 A JP11578473 A JP 11578473A JP 11578473 A JP11578473 A JP 11578473A JP S5068067 A JPS5068067 A JP S5068067A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11578473A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11578473A priority Critical patent/JPS5068067A/ja
Publication of JPS5068067A publication Critical patent/JPS5068067A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP11578473A 1973-10-17 1973-10-17 Pending JPS5068067A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11578473A JPS5068067A (en) 1973-10-17 1973-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11578473A JPS5068067A (en) 1973-10-17 1973-10-17

Publications (1)

Publication Number Publication Date
JPS5068067A true JPS5068067A (en) 1975-06-07

Family

ID=14670966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11578473A Pending JPS5068067A (en) 1973-10-17 1973-10-17

Country Status (1)

Country Link
JP (1) JPS5068067A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5288967U (en) * 1975-12-26 1977-07-02
JPS61183528U (en) * 1985-05-09 1986-11-15
JPH0223620A (en) * 1988-07-12 1990-01-25 Mitsubishi Electric Corp Washing method and washer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932857U (en) * 1972-06-26 1974-03-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932857U (en) * 1972-06-26 1974-03-22

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5288967U (en) * 1975-12-26 1977-07-02
JPS61183528U (en) * 1985-05-09 1986-11-15
JPH0238439Y2 (en) * 1985-05-09 1990-10-17
JPH0223620A (en) * 1988-07-12 1990-01-25 Mitsubishi Electric Corp Washing method and washer

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