JPS5066182A - - Google Patents
Info
- Publication number
- JPS5066182A JPS5066182A JP11392773A JP11392773A JPS5066182A JP S5066182 A JPS5066182 A JP S5066182A JP 11392773 A JP11392773 A JP 11392773A JP 11392773 A JP11392773 A JP 11392773A JP S5066182 A JPS5066182 A JP S5066182A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Non-Volatile Memory (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11392773A JPS5431793B2 (enExample) | 1973-10-12 | 1973-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11392773A JPS5431793B2 (enExample) | 1973-10-12 | 1973-10-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5066182A true JPS5066182A (enExample) | 1975-06-04 |
| JPS5431793B2 JPS5431793B2 (enExample) | 1979-10-09 |
Family
ID=14624665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11392773A Expired JPS5431793B2 (enExample) | 1973-10-12 | 1973-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5431793B2 (enExample) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5124876A (en) * | 1974-08-23 | 1976-02-28 | Mitsubishi Electric Corp | Handotaisoshino seizohoho |
| JPS5236477A (en) * | 1975-09-17 | 1977-03-19 | Philips Nv | Method of producing semiconductor device |
| JPS5293278A (en) * | 1976-01-30 | 1977-08-05 | Matsushita Electronics Corp | Manufacture for mos type semiconductor intergrated circuit |
| JPS533780A (en) * | 1976-06-30 | 1978-01-13 | Ibm | Method of producing fet transistor |
| JPS53103380A (en) * | 1977-02-22 | 1978-09-08 | Oki Electric Ind Co Ltd | Production of semiconductor device |
| JPS5466077A (en) * | 1977-11-04 | 1979-05-28 | Mitsubishi Electric Corp | Semiconductor device and its manufacture |
| US4339656A (en) * | 1978-02-07 | 1982-07-13 | Mitsubishi Denki Kabushiki Kaisha | Glow discharge heating apparatus |
| JPS58107674A (ja) * | 1981-12-22 | 1983-06-27 | Fujitsu Ltd | 半導体装置の製造方法 |
| JPS6119176A (ja) * | 1984-07-06 | 1986-01-28 | Toshiba Corp | 半導体装置の製造方法 |
-
1973
- 1973-10-12 JP JP11392773A patent/JPS5431793B2/ja not_active Expired
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5124876A (en) * | 1974-08-23 | 1976-02-28 | Mitsubishi Electric Corp | Handotaisoshino seizohoho |
| JPS5236477A (en) * | 1975-09-17 | 1977-03-19 | Philips Nv | Method of producing semiconductor device |
| JPS5293278A (en) * | 1976-01-30 | 1977-08-05 | Matsushita Electronics Corp | Manufacture for mos type semiconductor intergrated circuit |
| JPS533780A (en) * | 1976-06-30 | 1978-01-13 | Ibm | Method of producing fet transistor |
| JPS53103380A (en) * | 1977-02-22 | 1978-09-08 | Oki Electric Ind Co Ltd | Production of semiconductor device |
| JPS5466077A (en) * | 1977-11-04 | 1979-05-28 | Mitsubishi Electric Corp | Semiconductor device and its manufacture |
| US4339656A (en) * | 1978-02-07 | 1982-07-13 | Mitsubishi Denki Kabushiki Kaisha | Glow discharge heating apparatus |
| US4410792A (en) * | 1978-02-07 | 1983-10-18 | Mitsubishi Denki Kabushiki Kaisha | Glow discharge heating apparatus |
| JPS58107674A (ja) * | 1981-12-22 | 1983-06-27 | Fujitsu Ltd | 半導体装置の製造方法 |
| JPS6119176A (ja) * | 1984-07-06 | 1986-01-28 | Toshiba Corp | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5431793B2 (enExample) | 1979-10-09 |