JPS5066182A - - Google Patents

Info

Publication number
JPS5066182A
JPS5066182A JP11392773A JP11392773A JPS5066182A JP S5066182 A JPS5066182 A JP S5066182A JP 11392773 A JP11392773 A JP 11392773A JP 11392773 A JP11392773 A JP 11392773A JP S5066182 A JPS5066182 A JP S5066182A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11392773A
Other languages
Japanese (ja)
Other versions
JPS5431793B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11392773A priority Critical patent/JPS5431793B2/ja
Publication of JPS5066182A publication Critical patent/JPS5066182A/ja
Publication of JPS5431793B2 publication Critical patent/JPS5431793B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Non-Volatile Memory (AREA)
JP11392773A 1973-10-12 1973-10-12 Expired JPS5431793B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11392773A JPS5431793B2 (enrdf_load_stackoverflow) 1973-10-12 1973-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11392773A JPS5431793B2 (enrdf_load_stackoverflow) 1973-10-12 1973-10-12

Publications (2)

Publication Number Publication Date
JPS5066182A true JPS5066182A (enrdf_load_stackoverflow) 1975-06-04
JPS5431793B2 JPS5431793B2 (enrdf_load_stackoverflow) 1979-10-09

Family

ID=14624665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11392773A Expired JPS5431793B2 (enrdf_load_stackoverflow) 1973-10-12 1973-10-12

Country Status (1)

Country Link
JP (1) JPS5431793B2 (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5124876A (en) * 1974-08-23 1976-02-28 Mitsubishi Electric Corp Handotaisoshino seizohoho
JPS5236477A (en) * 1975-09-17 1977-03-19 Philips Nv Method of producing semiconductor device
JPS5293278A (en) * 1976-01-30 1977-08-05 Matsushita Electronics Corp Manufacture for mos type semiconductor intergrated circuit
JPS533780A (en) * 1976-06-30 1978-01-13 Ibm Method of producing fet transistor
JPS53103380A (en) * 1977-02-22 1978-09-08 Oki Electric Ind Co Ltd Production of semiconductor device
JPS5466077A (en) * 1977-11-04 1979-05-28 Mitsubishi Electric Corp Semiconductor device and its manufacture
US4339656A (en) * 1978-02-07 1982-07-13 Mitsubishi Denki Kabushiki Kaisha Glow discharge heating apparatus
JPS58107674A (ja) * 1981-12-22 1983-06-27 Fujitsu Ltd 半導体装置の製造方法
JPS6119176A (ja) * 1984-07-06 1986-01-28 Toshiba Corp 半導体装置の製造方法

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5124876A (en) * 1974-08-23 1976-02-28 Mitsubishi Electric Corp Handotaisoshino seizohoho
JPS5236477A (en) * 1975-09-17 1977-03-19 Philips Nv Method of producing semiconductor device
JPS5293278A (en) * 1976-01-30 1977-08-05 Matsushita Electronics Corp Manufacture for mos type semiconductor intergrated circuit
JPS533780A (en) * 1976-06-30 1978-01-13 Ibm Method of producing fet transistor
JPS53103380A (en) * 1977-02-22 1978-09-08 Oki Electric Ind Co Ltd Production of semiconductor device
JPS5466077A (en) * 1977-11-04 1979-05-28 Mitsubishi Electric Corp Semiconductor device and its manufacture
US4339656A (en) * 1978-02-07 1982-07-13 Mitsubishi Denki Kabushiki Kaisha Glow discharge heating apparatus
US4410792A (en) * 1978-02-07 1983-10-18 Mitsubishi Denki Kabushiki Kaisha Glow discharge heating apparatus
JPS58107674A (ja) * 1981-12-22 1983-06-27 Fujitsu Ltd 半導体装置の製造方法
JPS6119176A (ja) * 1984-07-06 1986-01-28 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5431793B2 (enrdf_load_stackoverflow) 1979-10-09

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