JPS5063965A - - Google Patents
Info
- Publication number
- JPS5063965A JPS5063965A JP48113008A JP11300873A JPS5063965A JP S5063965 A JPS5063965 A JP S5063965A JP 48113008 A JP48113008 A JP 48113008A JP 11300873 A JP11300873 A JP 11300873A JP S5063965 A JPS5063965 A JP S5063965A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11300873A JPS5313296B2 (enExample) | 1973-10-06 | 1973-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11300873A JPS5313296B2 (enExample) | 1973-10-06 | 1973-10-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5063965A true JPS5063965A (enExample) | 1975-05-30 |
| JPS5313296B2 JPS5313296B2 (enExample) | 1978-05-09 |
Family
ID=14601113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11300873A Expired JPS5313296B2 (enExample) | 1973-10-06 | 1973-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5313296B2 (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5523372U (enExample) * | 1978-08-01 | 1980-02-15 | ||
| JPS6090630U (ja) * | 1983-11-28 | 1985-06-21 | オーバル機器工業株式会社 | 気体用流量計試験装置 |
| JPS6112045U (ja) * | 1984-06-26 | 1986-01-24 | 株式会社 堀場製作所 | ダスト・サンプリング装置 |
| JPS6320027U (enExample) * | 1987-07-06 | 1988-02-09 | ||
| JP2008089575A (ja) * | 2006-08-14 | 2008-04-17 | Applied Materials Inc | ガスフロー測定方法及び装置 |
-
1973
- 1973-10-06 JP JP11300873A patent/JPS5313296B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5523372U (enExample) * | 1978-08-01 | 1980-02-15 | ||
| JPS6090630U (ja) * | 1983-11-28 | 1985-06-21 | オーバル機器工業株式会社 | 気体用流量計試験装置 |
| JPS6112045U (ja) * | 1984-06-26 | 1986-01-24 | 株式会社 堀場製作所 | ダスト・サンプリング装置 |
| JPS6320027U (enExample) * | 1987-07-06 | 1988-02-09 | ||
| JP2008089575A (ja) * | 2006-08-14 | 2008-04-17 | Applied Materials Inc | ガスフロー測定方法及び装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5313296B2 (enExample) | 1978-05-09 |