JPS5061382A - - Google Patents
Info
- Publication number
- JPS5061382A JPS5061382A JP11078373A JP11078373A JPS5061382A JP S5061382 A JPS5061382 A JP S5061382A JP 11078373 A JP11078373 A JP 11078373A JP 11078373 A JP11078373 A JP 11078373A JP S5061382 A JPS5061382 A JP S5061382A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11078373A JPS5061382A (en:Method) | 1973-10-02 | 1973-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11078373A JPS5061382A (en:Method) | 1973-10-02 | 1973-10-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5061382A true JPS5061382A (en:Method) | 1975-05-26 |
Family
ID=14544492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11078373A Pending JPS5061382A (en:Method) | 1973-10-02 | 1973-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5061382A (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS537585A (en) * | 1976-07-10 | 1978-01-24 | Makoto Katsurai | Spattering apparatus of horizontalltype discharge with cross magnetic field |
| JPS5956738U (ja) * | 1982-10-05 | 1984-04-13 | 富士通株式会社 | スパツタ用タ−ゲツト |
| JPH01132761A (ja) * | 1987-11-19 | 1989-05-25 | Fujitsu Ltd | スパッタリング・ターゲット電極 |
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1973
- 1973-10-02 JP JP11078373A patent/JPS5061382A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS537585A (en) * | 1976-07-10 | 1978-01-24 | Makoto Katsurai | Spattering apparatus of horizontalltype discharge with cross magnetic field |
| JPS5956738U (ja) * | 1982-10-05 | 1984-04-13 | 富士通株式会社 | スパツタ用タ−ゲツト |
| JPH01132761A (ja) * | 1987-11-19 | 1989-05-25 | Fujitsu Ltd | スパッタリング・ターゲット電極 |