JPS5057581A - - Google Patents
Info
- Publication number
- JPS5057581A JPS5057581A JP48106277A JP10627773A JPS5057581A JP S5057581 A JPS5057581 A JP S5057581A JP 48106277 A JP48106277 A JP 48106277A JP 10627773 A JP10627773 A JP 10627773A JP S5057581 A JPS5057581 A JP S5057581A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48106277A JPS5057581A (en) | 1973-09-20 | 1973-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48106277A JPS5057581A (en) | 1973-09-20 | 1973-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5057581A true JPS5057581A (en) | 1975-05-20 |
Family
ID=14429571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48106277A Pending JPS5057581A (en) | 1973-09-20 | 1973-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5057581A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62226628A (en) * | 1986-03-27 | 1987-10-05 | Nec Corp | Positioning method |
-
1973
- 1973-09-20 JP JP48106277A patent/JPS5057581A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62226628A (en) * | 1986-03-27 | 1987-10-05 | Nec Corp | Positioning method |
| JPH0546969B2 (en) * | 1986-03-27 | 1993-07-15 | Nippon Electric Co |