JPS5056892A - - Google Patents
Info
- Publication number
- JPS5056892A JPS5056892A JP49101810A JP10181074A JPS5056892A JP S5056892 A JPS5056892 A JP S5056892A JP 49101810 A JP49101810 A JP 49101810A JP 10181074 A JP10181074 A JP 10181074A JP S5056892 A JPS5056892 A JP S5056892A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Measuring Fluid Pressure (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/394,350 US3982200A (en) | 1973-09-04 | 1973-09-04 | Electron beam gas discharge laser pressure control |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5056892A true JPS5056892A (enExample) | 1975-05-17 |
| JPS5755239B2 JPS5755239B2 (enExample) | 1982-11-22 |
Family
ID=23558579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49101810A Expired JPS5755239B2 (enExample) | 1973-09-04 | 1974-09-04 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US3982200A (enExample) |
| JP (1) | JPS5755239B2 (enExample) |
| CA (1) | CA1015436A (enExample) |
| CH (1) | CH585979A5 (enExample) |
| DE (1) | DE2442408C2 (enExample) |
| FR (1) | FR2242791B1 (enExample) |
| GB (1) | GB1448536A (enExample) |
| IL (1) | IL45517A (enExample) |
| IT (1) | IT1020421B (enExample) |
| SE (1) | SE393901B (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58144862U (ja) * | 1982-03-25 | 1983-09-29 | 株式会社東芝 | ガスレ−ザ装置 |
| JPS58182887A (ja) * | 1982-04-21 | 1983-10-25 | Matsushita Electric Ind Co Ltd | レ−ザ発振器 |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2534322C3 (de) * | 1975-07-31 | 1978-09-21 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen | Jodlaser |
| US5315610A (en) * | 1986-09-22 | 1994-05-24 | The United States Of America As Represented The The Unites States Department Of Energy | System for controlling the flow of gas into and out of a gas laser |
| EP0263994B1 (de) * | 1986-09-30 | 1991-03-06 | Siemens Aktiengesellschaft | Einrichtung zur Herstellung eines Gasgemisches |
| US4794613A (en) * | 1987-07-27 | 1988-12-27 | Prc Corporation | Laser fluid flow control apparatus and method |
| US5081635A (en) * | 1987-08-25 | 1992-01-14 | Kabushiki Kaisha Komatsu Seisakusho | Apparatus for controlling output from an excimer laser device |
| US4888786A (en) * | 1988-05-09 | 1989-12-19 | United Technologies Corporation | Laser gas composition control arrangement and method |
| JPH0642568B2 (ja) * | 1989-07-13 | 1994-06-01 | 住友重機械工業株式会社 | シンクロトロン放射光励起レーザ装置 |
| GB8927209D0 (en) * | 1989-12-01 | 1990-01-31 | British Aerospace | Apparatus for controlling the composition of a laser gas or gas mixture |
| JP2607159Y2 (ja) * | 1993-09-29 | 2001-04-16 | 株式会社小松製作所 | ガスレーザ装置 |
| US6625191B2 (en) * | 1999-12-10 | 2003-09-23 | Cymer, Inc. | Very narrow band, two chamber, high rep rate gas discharge laser system |
| US7215697B2 (en) * | 1999-08-27 | 2007-05-08 | Hill Alan E | Matched impedance controlled avalanche driver |
| US6771684B2 (en) * | 2000-03-02 | 2004-08-03 | Alan E. Hill | Compact, flexible, rapid-pulsed, molecular gas laser |
| RU2298271C2 (ru) * | 2001-08-29 | 2007-04-27 | Саймер, Инк. | Система двухкамерного f2 лазера с выбором линии |
| RU2340057C2 (ru) * | 2001-08-29 | 2008-11-27 | Саймер, Инк. | Лазерный литографический источник света с доставкой пучка |
| CN103701015A (zh) * | 2013-12-11 | 2014-04-02 | 深圳市大族激光科技股份有限公司 | 气体激光器回充保护气体的控制方法及其控制装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3605038A (en) * | 1970-04-30 | 1971-09-14 | Ibm | Population inversion and gain in molecular gases excited by vibrationally excited hydrogen |
| US3702973A (en) * | 1970-09-17 | 1972-11-14 | Avco Corp | Laser or ozone generator in which a broad electron beam with a sustainer field produce a large area, uniform discharge |
| US3789321A (en) * | 1972-09-14 | 1974-01-29 | Atomic Energy Commission | Electron beam-pumped gas laser system |
-
1973
- 1973-09-04 US US05/394,350 patent/US3982200A/en not_active Expired - Lifetime
-
1974
- 1974-08-20 GB GB3663674A patent/GB1448536A/en not_active Expired
- 1974-08-21 SE SE7410615A patent/SE393901B/xx unknown
- 1974-08-22 IL IL45517A patent/IL45517A/en unknown
- 1974-08-26 CA CA207,829A patent/CA1015436A/en not_active Expired
- 1974-08-29 FR FR7429516A patent/FR2242791B1/fr not_active Expired
- 1974-09-03 DE DE2442408A patent/DE2442408C2/de not_active Expired
- 1974-09-03 CH CH1198374A patent/CH585979A5/xx not_active IP Right Cessation
- 1974-09-03 IT IT26892/74A patent/IT1020421B/it active
- 1974-09-04 JP JP49101810A patent/JPS5755239B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58144862U (ja) * | 1982-03-25 | 1983-09-29 | 株式会社東芝 | ガスレ−ザ装置 |
| JPS58182887A (ja) * | 1982-04-21 | 1983-10-25 | Matsushita Electric Ind Co Ltd | レ−ザ発振器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5755239B2 (enExample) | 1982-11-22 |
| FR2242791A1 (enExample) | 1975-03-28 |
| CA1015436A (en) | 1977-08-09 |
| SE393901B (sv) | 1977-05-23 |
| US3982200A (en) | 1976-09-21 |
| IT1020421B (it) | 1977-12-20 |
| CH585979A5 (enExample) | 1977-03-15 |
| DE2442408C2 (de) | 1985-12-05 |
| DE2442408A1 (de) | 1975-03-06 |
| USB394350I5 (enExample) | 1976-01-13 |
| FR2242791B1 (enExample) | 1978-08-04 |
| IL45517A0 (en) | 1975-04-25 |
| SE7410615L (enExample) | 1975-03-05 |
| GB1448536A (en) | 1976-09-08 |
| IL45517A (en) | 1976-06-30 |