JPS5056379A - - Google Patents
Info
- Publication number
- JPS5056379A JPS5056379A JP49105910A JP10591074A JPS5056379A JP S5056379 A JPS5056379 A JP S5056379A JP 49105910 A JP49105910 A JP 49105910A JP 10591074 A JP10591074 A JP 10591074A JP S5056379 A JPS5056379 A JP S5056379A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19732346394 DE2346394C3 (de) | 1973-09-14 | Verfahren zum Herstellen dünner Schichten aus Wolfram oder Molybdän |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5056379A true JPS5056379A (ja) | 1975-05-17 |
| JPS5329311B2 JPS5329311B2 (ja) | 1978-08-19 |
Family
ID=5892609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10591074A Expired JPS5329311B2 (ja) | 1973-09-14 | 1974-09-13 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3963839A (ja) |
| JP (1) | JPS5329311B2 (ja) |
| AT (1) | AT342719B (ja) |
| CH (1) | CH606478A5 (ja) |
| FR (1) | FR2244013B1 (ja) |
| GB (1) | GB1442109A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2722668C3 (de) * | 1977-05-18 | 1980-04-10 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Herstellen dünner Schichten aus hochtemperaturfesten Metallen wie Wolfram, Molybdän, Rhenium oder Osmium |
| US5064788A (en) * | 1986-09-16 | 1991-11-12 | Lanxide Technology Company, Lp | Production of ceramic and ceramic-metal composite articles with surface coatings |
| US5516595A (en) * | 1986-09-16 | 1996-05-14 | Lanxide Technology Company, Lp | Production of ceramic and ceramic-metal composite articles with surface coatings |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3462298A (en) * | 1964-09-09 | 1969-08-19 | Nippon Electric Co | Oxide coating for semiconductor surfaces |
| US3294654A (en) * | 1965-07-28 | 1966-12-27 | Ethyl Corp | Metal plating process |
| US3669724A (en) * | 1970-09-28 | 1972-06-13 | Motorola Inc | Method of vapor depositing a tungsten-tungsten oxide coating |
-
1974
- 1974-07-26 CH CH1029774A patent/CH606478A5/xx not_active IP Right Cessation
- 1974-08-14 AT AT665674A patent/AT342719B/de not_active IP Right Cessation
- 1974-08-21 FR FR7428769A patent/FR2244013B1/fr not_active Expired
- 1974-08-29 GB GB3788374A patent/GB1442109A/en not_active Expired
- 1974-08-29 US US05/501,660 patent/US3963839A/en not_active Expired - Lifetime
- 1974-09-13 JP JP10591074A patent/JPS5329311B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2346394B2 (de) | 1976-01-29 |
| ATA665674A (de) | 1977-08-15 |
| CH606478A5 (ja) | 1978-10-31 |
| AT342719B (de) | 1978-04-25 |
| FR2244013A1 (ja) | 1975-04-11 |
| US3963839A (en) | 1976-06-15 |
| GB1442109A (en) | 1976-07-07 |
| JPS5329311B2 (ja) | 1978-08-19 |
| FR2244013B1 (ja) | 1979-01-05 |
| DE2346394A1 (de) | 1975-04-10 |