JPS5054380A - - Google Patents
Info
- Publication number
- JPS5054380A JPS5054380A JP49057420A JP5742074A JPS5054380A JP S5054380 A JPS5054380 A JP S5054380A JP 49057420 A JP49057420 A JP 49057420A JP 5742074 A JP5742074 A JP 5742074A JP S5054380 A JPS5054380 A JP S5054380A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0059—Arc discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/006—Tubes with electron bombarded gas (e.g. with plasma filter)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2461973A GB1403946A (en) | 1973-05-23 | 1973-05-23 | Spectroscopy |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5054380A true JPS5054380A (ja) | 1975-05-14 |
Family
ID=10214547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49057420A Pending JPS5054380A (ja) | 1973-05-23 | 1974-05-23 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4134014A (ja) |
| JP (1) | JPS5054380A (ja) |
| FR (1) | FR2230999B1 (ja) |
| GB (1) | GB1403946A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6150045A (ja) * | 1985-08-09 | 1986-03-12 | Nec Corp | オージエ電子分光スペクトル測定方法 |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4182959A (en) * | 1978-07-27 | 1980-01-08 | SEA Investigation Division, Inc. | Methods for use in fire investigation |
| JPS5932145A (ja) * | 1982-08-16 | 1984-02-21 | Hitachi Ltd | 電位検出装置 |
| US4492866A (en) * | 1983-05-02 | 1985-01-08 | The United States Of America As Represented By The Secretary Of The Navy | Method for predicting the performance of cathode materials |
| EP1777728A1 (en) * | 2005-10-20 | 2007-04-25 | Carl Zeiss SMS GmbH | Lithography system |
| DE102005061687B4 (de) * | 2005-12-21 | 2008-04-10 | Carl Zeiss Nts Gmbh | Verfahren und Vorrichtung zur Abstandsmessung sowie Verwendung des Verfahrens und der Vorrichtung zur Topographiebestimmung |
| US7855362B1 (en) * | 2007-10-25 | 2010-12-21 | Kla-Tencor Technologies Corporation | Contamination pinning for auger analysis |
| US8283631B2 (en) * | 2008-05-08 | 2012-10-09 | Kla-Tencor Corporation | In-situ differential spectroscopy |
| RU2552596C2 (ru) * | 2012-10-16 | 2015-06-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский авиационный институт (национальный исследовательский университет)" (МАИ) | Датчик вторичной электронной эмиссии |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3535516A (en) * | 1966-10-17 | 1970-10-20 | Hitachi Ltd | Electron microscope employing a modulated scanning beam and a phase sensitive detector to improve the signal to noise ratio |
| GB1286454A (en) * | 1968-08-24 | 1972-08-23 | Cambridge Scientific Instr Ltd | Surface potential analysis by electron beams |
| US3681600A (en) * | 1969-10-24 | 1972-08-01 | Perkin Elmer Corp | Retarding field electron spectrometer |
| DE2005682C3 (de) * | 1970-02-07 | 1974-05-09 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Vorrichtung zum Absaugen der Sekundärelektronen in einem Rasterelektronenmikroskop oder einem Elektronenstrahl-Mikroanalysator |
-
1973
- 1973-05-23 GB GB2461973A patent/GB1403946A/en not_active Expired
-
1974
- 1974-05-09 US US05/468,278 patent/US4134014A/en not_active Expired - Lifetime
- 1974-05-22 FR FR7417841A patent/FR2230999B1/fr not_active Expired
- 1974-05-23 JP JP49057420A patent/JPS5054380A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6150045A (ja) * | 1985-08-09 | 1986-03-12 | Nec Corp | オージエ電子分光スペクトル測定方法 |
| JPH0130101B2 (ja) * | 1985-08-09 | 1989-06-16 | Nippon Electric Co |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2230999A1 (ja) | 1974-12-20 |
| US4134014A (en) | 1979-01-09 |
| GB1403946A (en) | 1975-08-28 |
| FR2230999B1 (ja) | 1977-03-11 |