FR2230999B1 - - Google Patents

Info

Publication number
FR2230999B1
FR2230999B1 FR7417841A FR7417841A FR2230999B1 FR 2230999 B1 FR2230999 B1 FR 2230999B1 FR 7417841 A FR7417841 A FR 7417841A FR 7417841 A FR7417841 A FR 7417841A FR 2230999 B1 FR2230999 B1 FR 2230999B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7417841A
Other versions
FR2230999A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2230999A1 publication Critical patent/FR2230999A1/fr
Application granted granted Critical
Publication of FR2230999B1 publication Critical patent/FR2230999B1/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/44Energy spectrometers, e.g. alpha-, beta-spectrometers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00Discharge tubes and lamps
    • H01J2893/0059Arc discharge tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00Discharge tubes and lamps
    • H01J2893/006Tubes with electron bombarded gas (e.g. with plasma filter)
FR7417841A 1973-05-23 1974-05-22 Expired FR2230999B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2461973A GB1403946A (en) 1973-05-23 1973-05-23 Spectroscopy

Publications (2)

Publication Number Publication Date
FR2230999A1 FR2230999A1 (fr) 1974-12-20
FR2230999B1 true FR2230999B1 (fr) 1977-03-11

Family

ID=10214547

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7417841A Expired FR2230999B1 (fr) 1973-05-23 1974-05-22

Country Status (4)

Country Link
US (1) US4134014A (fr)
JP (1) JPS5054380A (fr)
FR (1) FR2230999B1 (fr)
GB (1) GB1403946A (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4182959A (en) * 1978-07-27 1980-01-08 SEA Investigation Division, Inc. Methods for use in fire investigation
JPS5932145A (ja) * 1982-08-16 1984-02-21 Hitachi Ltd 電位検出装置
US4492866A (en) * 1983-05-02 1985-01-08 The United States Of America As Represented By The Secretary Of The Navy Method for predicting the performance of cathode materials
JPS6150045A (ja) * 1985-08-09 1986-03-12 Nec Corp オージエ電子分光スペクトル測定方法
EP1777728A1 (fr) * 2005-10-20 2007-04-25 Carl Zeiss SMS GmbH Sytème lithographique
DE102005061687B4 (de) * 2005-12-21 2008-04-10 Carl Zeiss Nts Gmbh Verfahren und Vorrichtung zur Abstandsmessung sowie Verwendung des Verfahrens und der Vorrichtung zur Topographiebestimmung
US7855362B1 (en) * 2007-10-25 2010-12-21 Kla-Tencor Technologies Corporation Contamination pinning for auger analysis
US8283631B2 (en) * 2008-05-08 2012-10-09 Kla-Tencor Corporation In-situ differential spectroscopy
RU2552596C2 (ru) * 2012-10-16 2015-06-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский авиационный институт (национальный исследовательский университет)" (МАИ) Датчик вторичной электронной эмиссии

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535516A (en) * 1966-10-17 1970-10-20 Hitachi Ltd Electron microscope employing a modulated scanning beam and a phase sensitive detector to improve the signal to noise ratio
GB1286454A (en) * 1968-08-24 1972-08-23 Cambridge Scientific Instr Ltd Surface potential analysis by electron beams
US3681600A (en) * 1969-10-24 1972-08-01 Perkin Elmer Corp Retarding field electron spectrometer
DE2005682C3 (de) * 1970-02-07 1974-05-09 Siemens Ag, 1000 Berlin Und 8000 Muenchen Vorrichtung zum Absaugen der Sekundärelektronen in einem Rasterelektronenmikroskop oder einem Elektronenstrahl-Mikroanalysator

Also Published As

Publication number Publication date
FR2230999A1 (fr) 1974-12-20
US4134014A (en) 1979-01-09
JPS5054380A (fr) 1975-05-14
GB1403946A (en) 1975-08-28

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Legal Events

Date Code Title Description
ST Notification of lapse