JPS5045742A - - Google Patents

Info

Publication number
JPS5045742A
JPS5045742A JP49057224A JP5722474A JPS5045742A JP S5045742 A JPS5045742 A JP S5045742A JP 49057224 A JP49057224 A JP 49057224A JP 5722474 A JP5722474 A JP 5722474A JP S5045742 A JPS5045742 A JP S5045742A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49057224A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5045742A publication Critical patent/JPS5045742A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/80—Etching
    • H10P50/667—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP49057224A 1973-08-27 1974-05-21 Pending JPS5045742A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US39163573A 1973-08-27 1973-08-27

Publications (1)

Publication Number Publication Date
JPS5045742A true JPS5045742A (ja) 1975-04-24

Family

ID=23547361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49057224A Pending JPS5045742A (ja) 1973-08-27 1974-05-21

Country Status (2)

Country Link
JP (1) JPS5045742A (ja)
DE (1) DE2425379A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102678604A (zh) * 2012-04-19 2012-09-19 台达电子企业管理（上海）有限公司 一种散热风扇及其底座的金属蚀刻方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2049210B (en) * 1979-02-26 1983-09-01 Shipley Co Photographic formation of visible images
EP0082210B1 (de) * 1981-12-18 1985-04-10 Mta Müszaki Fizikai Kutato Intezete Verfahren zum selektiven Lösen von Molybdän in Gegenwart von Wolfram
DE19535307C2 (de) * 1995-09-22 1997-10-23 Siemens Ag Ätzlösung zur Erzeugung sehr feiner Strukturen in Molybdän-Oberflächen und Verfahren unter deren Einsatz
KR100364831B1 (ko) * 2000-03-20 2002-12-16 엘지.필립스 엘시디 주식회사 몰리브덴 금속막용 에칭 용액

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102678604A (zh) * 2012-04-19 2012-09-19 台达电子企业管理（上海）有限公司 一种散热风扇及其底座的金属蚀刻方法

Also Published As

Publication number Publication date
DE2425379A1 (de) 1975-03-27

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