JPS5036795B1 - - Google Patents

Info

Publication number
JPS5036795B1
JPS5036795B1 JP9559270A JP9559270A JPS5036795B1 JP S5036795 B1 JPS5036795 B1 JP S5036795B1 JP 9559270 A JP9559270 A JP 9559270A JP 9559270 A JP9559270 A JP 9559270A JP S5036795 B1 JPS5036795 B1 JP S5036795B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9559270A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9559270A priority Critical patent/JPS5036795B1/ja
Priority to BE774740A priority patent/BE774740A/xx
Priority to GB5050571A priority patent/GB1373241A/en
Priority to DE19712154086 priority patent/DE2154086C3/de
Priority to FR7139122A priority patent/FR2110158A5/fr
Publication of JPS5036795B1 publication Critical patent/JPS5036795B1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP9559270A 1970-10-31 1970-10-31 Pending JPS5036795B1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP9559270A JPS5036795B1 (ja) 1970-10-31 1970-10-31
BE774740A BE774740A (fr) 1970-10-31 1971-10-29 Procede et appareil de detection automatique des defauts de vitres de verre
GB5050571A GB1373241A (en) 1970-10-31 1971-10-29 Method and apparatus for detecting defects or irregularities in glass sheet
DE19712154086 DE2154086C3 (de) 1970-10-31 1971-10-29 Vorrichtung zum photoelektrischen Abtasten einer kontinuierlich bewegten Flachglasbahn für die selbsttätige Fehlerfeststellung
FR7139122A FR2110158A5 (ja) 1970-10-31 1971-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9559270A JPS5036795B1 (ja) 1970-10-31 1970-10-31

Publications (1)

Publication Number Publication Date
JPS5036795B1 true JPS5036795B1 (ja) 1975-11-27

Family

ID=14141832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9559270A Pending JPS5036795B1 (ja) 1970-10-31 1970-10-31

Country Status (5)

Country Link
JP (1) JPS5036795B1 (ja)
BE (1) BE774740A (ja)
DE (1) DE2154086C3 (ja)
FR (1) FR2110158A5 (ja)
GB (1) GB1373241A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011149800A (ja) * 2010-01-21 2011-08-04 Tokyo Electron Ltd 基板検査装置及び基板検査方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4166700A (en) * 1977-06-24 1979-09-04 Research Technology, Inc. Film thickness detector
US4402607A (en) * 1980-05-16 1983-09-06 Gca Corporation Automatic detector for microscopic dust on large-area, optically unpolished surfaces
DE3800053A1 (de) * 1988-01-04 1989-07-13 Sick Optik Elektronik Erwin Optische fehlerinspektionsvorrichtung
DE3806384A1 (de) * 1988-02-29 1989-09-07 Feldmuehle Ag Verfahren und vorrichtung zum pruefen von laufenden transparenten bahnen
CN113167561B (zh) * 2018-09-19 2023-12-22 康宁股份有限公司 使用边缘缺陷量规测量玻璃片的边缘缺陷尺寸的方法及相应的边缘缺陷量规

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1036627A (en) * 1962-05-02 1966-07-20 Licentia Gmbh An apparatus for the photo-electric scanning of moving objects

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1036627A (en) * 1962-05-02 1966-07-20 Licentia Gmbh An apparatus for the photo-electric scanning of moving objects

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011149800A (ja) * 2010-01-21 2011-08-04 Tokyo Electron Ltd 基板検査装置及び基板検査方法

Also Published As

Publication number Publication date
DE2154086B2 (ja) 1974-05-16
GB1373241A (en) 1974-11-06
DE2154086C3 (de) 1975-01-23
BE774740A (fr) 1972-05-02
FR2110158A5 (ja) 1972-05-26
DE2154086A1 (de) 1972-05-10

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