JPS5036795B1 - - Google Patents
Info
- Publication number
- JPS5036795B1 JPS5036795B1 JP9559270A JP9559270A JPS5036795B1 JP S5036795 B1 JPS5036795 B1 JP S5036795B1 JP 9559270 A JP9559270 A JP 9559270A JP 9559270 A JP9559270 A JP 9559270A JP S5036795 B1 JPS5036795 B1 JP S5036795B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9559270A JPS5036795B1 (ja) | 1970-10-31 | 1970-10-31 | |
FR7139122A FR2110158A5 (ja) | 1970-10-31 | 1971-10-29 | |
DE19712154086 DE2154086C3 (de) | 1970-10-31 | 1971-10-29 | Vorrichtung zum photoelektrischen Abtasten einer kontinuierlich bewegten Flachglasbahn für die selbsttätige Fehlerfeststellung |
GB5050571A GB1373241A (en) | 1970-10-31 | 1971-10-29 | Method and apparatus for detecting defects or irregularities in glass sheet |
BE774740A BE774740A (fr) | 1970-10-31 | 1971-10-29 | Procede et appareil de detection automatique des defauts de vitres de verre |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9559270A JPS5036795B1 (ja) | 1970-10-31 | 1970-10-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5036795B1 true JPS5036795B1 (ja) | 1975-11-27 |
Family
ID=14141832
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9559270A Pending JPS5036795B1 (ja) | 1970-10-31 | 1970-10-31 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5036795B1 (ja) |
BE (1) | BE774740A (ja) |
DE (1) | DE2154086C3 (ja) |
FR (1) | FR2110158A5 (ja) |
GB (1) | GB1373241A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011149800A (ja) * | 2010-01-21 | 2011-08-04 | Tokyo Electron Ltd | 基板検査装置及び基板検査方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4166700A (en) * | 1977-06-24 | 1979-09-04 | Research Technology, Inc. | Film thickness detector |
US4402607A (en) * | 1980-05-16 | 1983-09-06 | Gca Corporation | Automatic detector for microscopic dust on large-area, optically unpolished surfaces |
DE3800053A1 (de) * | 1988-01-04 | 1989-07-13 | Sick Optik Elektronik Erwin | Optische fehlerinspektionsvorrichtung |
DE3806384A1 (de) * | 1988-02-29 | 1989-09-07 | Feldmuehle Ag | Verfahren und vorrichtung zum pruefen von laufenden transparenten bahnen |
CN113167561B (zh) * | 2018-09-19 | 2023-12-22 | 康宁股份有限公司 | 使用边缘缺陷量规测量玻璃片的边缘缺陷尺寸的方法及相应的边缘缺陷量规 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1036627A (en) * | 1962-05-02 | 1966-07-20 | Licentia Gmbh | An apparatus for the photo-electric scanning of moving objects |
-
1970
- 1970-10-31 JP JP9559270A patent/JPS5036795B1/ja active Pending
-
1971
- 1971-10-29 GB GB5050571A patent/GB1373241A/en not_active Expired
- 1971-10-29 FR FR7139122A patent/FR2110158A5/fr not_active Expired
- 1971-10-29 DE DE19712154086 patent/DE2154086C3/de not_active Expired
- 1971-10-29 BE BE774740A patent/BE774740A/xx not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1036627A (en) * | 1962-05-02 | 1966-07-20 | Licentia Gmbh | An apparatus for the photo-electric scanning of moving objects |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011149800A (ja) * | 2010-01-21 | 2011-08-04 | Tokyo Electron Ltd | 基板検査装置及び基板検査方法 |
Also Published As
Publication number | Publication date |
---|---|
FR2110158A5 (ja) | 1972-05-26 |
DE2154086B2 (ja) | 1974-05-16 |
DE2154086C3 (de) | 1975-01-23 |
DE2154086A1 (de) | 1972-05-10 |
BE774740A (fr) | 1972-05-02 |
GB1373241A (en) | 1974-11-06 |