JPS5033772A - - Google Patents
Info
- Publication number
- JPS5033772A JPS5033772A JP8316473A JP8316473A JPS5033772A JP S5033772 A JPS5033772 A JP S5033772A JP 8316473 A JP8316473 A JP 8316473A JP 8316473 A JP8316473 A JP 8316473A JP S5033772 A JPS5033772 A JP S5033772A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8316473A JPS5033772A (ja) | 1973-07-25 | 1973-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8316473A JPS5033772A (ja) | 1973-07-25 | 1973-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5033772A true JPS5033772A (ja) | 1975-04-01 |
Family
ID=13794604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8316473A Pending JPS5033772A (ja) | 1973-07-25 | 1973-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5033772A (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5555520A (en) * | 1978-10-20 | 1980-04-23 | Hitachi Ltd | Method of controlling thickness of film |
| JPS5986239A (ja) * | 1983-09-14 | 1984-05-18 | Hitachi Ltd | 膜厚モニタ方法 |
| JPH03164497A (ja) * | 1989-11-24 | 1991-07-16 | Res Dev Corp Of Japan | 化合物結晶のエピタキシャル成長方法 |
| KR100379115B1 (ko) * | 2001-03-13 | 2003-04-07 | 김종배 | 조명장치를 가진 뜰채 |
-
1973
- 1973-07-25 JP JP8316473A patent/JPS5033772A/ja active Pending
Non-Patent Citations (2)
| Title |
|---|
| REVIEW OF SCIENTIFIC INSTRUMENTS#V38#N8 * |
| REVIW OF SCIENTIFIC INSTRUMENTS#V41#N2 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5555520A (en) * | 1978-10-20 | 1980-04-23 | Hitachi Ltd | Method of controlling thickness of film |
| JPS5986239A (ja) * | 1983-09-14 | 1984-05-18 | Hitachi Ltd | 膜厚モニタ方法 |
| JPH03164497A (ja) * | 1989-11-24 | 1991-07-16 | Res Dev Corp Of Japan | 化合物結晶のエピタキシャル成長方法 |
| KR100379115B1 (ko) * | 2001-03-13 | 2003-04-07 | 김종배 | 조명장치를 가진 뜰채 |