JPS5032047B2 - - Google Patents
Info
- Publication number
- JPS5032047B2 JPS5032047B2 JP6618471A JP6618471A JPS5032047B2 JP S5032047 B2 JPS5032047 B2 JP S5032047B2 JP 6618471 A JP6618471 A JP 6618471A JP 6618471 A JP6618471 A JP 6618471A JP S5032047 B2 JPS5032047 B2 JP S5032047B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Filtering Materials (AREA)
- Powder Metallurgy (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6618471A JPS5032047B2 (ja) | 1971-08-27 | 1971-08-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6618471A JPS5032047B2 (ja) | 1971-08-27 | 1971-08-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4831108A JPS4831108A (ja) | 1973-04-24 |
JPS5032047B2 true JPS5032047B2 (ja) | 1975-10-17 |
Family
ID=13308488
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6618471A Expired JPS5032047B2 (ja) | 1971-08-27 | 1971-08-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5032047B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60113369U (ja) * | 1984-01-09 | 1985-07-31 | 株式会社日立国際電気 | 真空容器へのガス急速供給装置 |
JP3218564B2 (ja) | 1998-01-14 | 2001-10-15 | キヤノン株式会社 | 多孔質領域の除去方法及び半導体基体の製造方法 |
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1971
- 1971-08-27 JP JP6618471A patent/JPS5032047B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS4831108A (ja) | 1973-04-24 |