JPS5031770A - - Google Patents

Info

Publication number
JPS5031770A
JPS5031770A JP49044396A JP4439674A JPS5031770A JP S5031770 A JPS5031770 A JP S5031770A JP 49044396 A JP49044396 A JP 49044396A JP 4439674 A JP4439674 A JP 4439674A JP S5031770 A JPS5031770 A JP S5031770A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49044396A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5031770A publication Critical patent/JPS5031770A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP49044396A 1973-04-19 1974-04-19 Pending JPS5031770A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1914273A GB1441824A (en) 1973-04-19 1973-04-19 Scanning electronbeam instrument

Publications (1)

Publication Number Publication Date
JPS5031770A true JPS5031770A (enrdf_load_stackoverflow) 1975-03-28

Family

ID=10124460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49044396A Pending JPS5031770A (enrdf_load_stackoverflow) 1973-04-19 1974-04-19

Country Status (4)

Country Link
US (1) US3900734A (enrdf_load_stackoverflow)
JP (1) JPS5031770A (enrdf_load_stackoverflow)
DE (1) DE2418279C2 (enrdf_load_stackoverflow)
GB (1) GB1441824A (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011761A (enrdf_load_stackoverflow) * 1973-06-04 1975-02-06
JPS50158273A (enrdf_load_stackoverflow) * 1974-06-10 1975-12-22
JPS5294768A (en) * 1976-02-04 1977-08-09 Jeol Ltd Electronic microscope
JPS52156546A (en) * 1976-06-23 1977-12-27 Jeol Ltd Image display unit of electron microscope
JPS5875748A (ja) * 1981-10-30 1983-05-07 Shimadzu Corp 走査型分析装置の像回転補正装置
JPS58165968U (ja) * 1982-04-30 1983-11-05 株式会社島津製作所 電子線走査型分析装置
JPS6161357A (ja) * 1984-08-31 1986-03-29 Jeol Ltd 電子線装置の走査回転装置
JPS61135457U (enrdf_load_stackoverflow) * 1985-02-14 1986-08-23
JPH0240851A (ja) * 1988-07-29 1990-02-09 Jeol Ltd 集束イオンビーム注入装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4057722A (en) * 1975-09-25 1977-11-08 Siemens Aktiengesellschaft Method and apparatus for the generation of distortion-free images with electron microscope
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope
JPS5773573A (en) * 1980-10-24 1982-05-08 Jeol Ltd Electronic beam scanning circuit
EP0314947A1 (de) * 1987-11-03 1989-05-10 Siemens Aktiengesellschaft Schaltung zur vergrösserungsunabhängigen Bildverschiebung in einem Korpuskularstrahlgerät

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1325540A (en) * 1969-10-10 1973-08-01 Texas Instruments Ltd Electron beam apparatus
NL7114692A (enrdf_load_stackoverflow) * 1970-10-28 1972-05-03

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011761A (enrdf_load_stackoverflow) * 1973-06-04 1975-02-06
JPS50158273A (enrdf_load_stackoverflow) * 1974-06-10 1975-12-22
JPS5294768A (en) * 1976-02-04 1977-08-09 Jeol Ltd Electronic microscope
JPS52156546A (en) * 1976-06-23 1977-12-27 Jeol Ltd Image display unit of electron microscope
JPS5875748A (ja) * 1981-10-30 1983-05-07 Shimadzu Corp 走査型分析装置の像回転補正装置
JPS58165968U (ja) * 1982-04-30 1983-11-05 株式会社島津製作所 電子線走査型分析装置
JPS6161357A (ja) * 1984-08-31 1986-03-29 Jeol Ltd 電子線装置の走査回転装置
JPS61135457U (enrdf_load_stackoverflow) * 1985-02-14 1986-08-23
JPH0240851A (ja) * 1988-07-29 1990-02-09 Jeol Ltd 集束イオンビーム注入装置

Also Published As

Publication number Publication date
US3900734A (en) 1975-08-19
GB1441824A (en) 1976-07-07
DE2418279A1 (de) 1974-11-07
DE2418279C2 (de) 1983-12-08

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