JPS5029185A - - Google Patents
Info
- Publication number
- JPS5029185A JPS5029185A JP7990073A JP7990073A JPS5029185A JP S5029185 A JPS5029185 A JP S5029185A JP 7990073 A JP7990073 A JP 7990073A JP 7990073 A JP7990073 A JP 7990073A JP S5029185 A JPS5029185 A JP S5029185A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48079900A JPS584458B2 (ja) | 1973-07-17 | 1973-07-17 | ハンドウタイソウチ ノ セイゾウホウホウ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48079900A JPS584458B2 (ja) | 1973-07-17 | 1973-07-17 | ハンドウタイソウチ ノ セイゾウホウホウ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5029185A true JPS5029185A (ja) | 1975-03-25 |
| JPS584458B2 JPS584458B2 (ja) | 1983-01-26 |
Family
ID=13703141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48079900A Expired JPS584458B2 (ja) | 1973-07-17 | 1973-07-17 | ハンドウタイソウチ ノ セイゾウホウホウ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS584458B2 (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5088980A (ja) * | 1973-12-10 | 1975-07-17 | ||
| JPS5088988A (ja) * | 1973-12-10 | 1975-07-17 | ||
| JPS58122751A (ja) * | 1982-01-18 | 1983-07-21 | Toshiba Corp | 半導体装置 |
| KR20230015061A (ko) * | 2021-07-22 | 2023-01-31 | 피에스케이 주식회사 | 기판 처리 장치 및 도어 어셈블리 구동 방법 |
-
1973
- 1973-07-17 JP JP48079900A patent/JPS584458B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5088980A (ja) * | 1973-12-10 | 1975-07-17 | ||
| JPS5088988A (ja) * | 1973-12-10 | 1975-07-17 | ||
| JPS58122751A (ja) * | 1982-01-18 | 1983-07-21 | Toshiba Corp | 半導体装置 |
| KR20230015061A (ko) * | 2021-07-22 | 2023-01-31 | 피에스케이 주식회사 | 기판 처리 장치 및 도어 어셈블리 구동 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS584458B2 (ja) | 1983-01-26 |