JPS5029171A - - Google Patents
Info
- Publication number
- JPS5029171A JPS5029171A JP7989673A JP7989673A JPS5029171A JP S5029171 A JPS5029171 A JP S5029171A JP 7989673 A JP7989673 A JP 7989673A JP 7989673 A JP7989673 A JP 7989673A JP S5029171 A JPS5029171 A JP S5029171A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
- Feeding Of Workpieces (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7989673A JPS5029171A (ja) | 1973-07-17 | 1973-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7989673A JPS5029171A (ja) | 1973-07-17 | 1973-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5029171A true JPS5029171A (ja) | 1975-03-25 |
Family
ID=13703027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7989673A Pending JPS5029171A (ja) | 1973-07-17 | 1973-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5029171A (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50113919U (ja) * | 1974-02-25 | 1975-09-17 | ||
| JPS61140432A (ja) * | 1984-12-11 | 1986-06-27 | Shinko Denki Kk | ウエハ−等の保持装置 |
| JPH01264806A (ja) * | 1981-11-10 | 1989-10-23 | Silicon Technol Corp | ウェハー製造方法およびその装置 |
| JP2006339234A (ja) * | 2005-05-31 | 2006-12-14 | Murata Mach Ltd | 非接触保持装置 |
| JP4565520B1 (ja) * | 2009-04-14 | 2010-10-20 | 智雄 松下 | 板状体の搬送装置 |
| WO2011027546A1 (ja) * | 2009-09-07 | 2011-03-10 | 村田機械株式会社 | 基板移載装置、および基板移載方法 |
-
1973
- 1973-07-17 JP JP7989673A patent/JPS5029171A/ja active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50113919U (ja) * | 1974-02-25 | 1975-09-17 | ||
| JPH01264806A (ja) * | 1981-11-10 | 1989-10-23 | Silicon Technol Corp | ウェハー製造方法およびその装置 |
| JPS61140432A (ja) * | 1984-12-11 | 1986-06-27 | Shinko Denki Kk | ウエハ−等の保持装置 |
| JP2006339234A (ja) * | 2005-05-31 | 2006-12-14 | Murata Mach Ltd | 非接触保持装置 |
| JP4538849B2 (ja) * | 2005-05-31 | 2010-09-08 | 村田機械株式会社 | 非接触保持装置 |
| JP4565520B1 (ja) * | 2009-04-14 | 2010-10-20 | 智雄 松下 | 板状体の搬送装置 |
| JP2010251454A (ja) * | 2009-04-14 | 2010-11-04 | Tomoo Matsushita | 板状体の搬送装置 |
| WO2011027546A1 (ja) * | 2009-09-07 | 2011-03-10 | 村田機械株式会社 | 基板移載装置、および基板移載方法 |
| JP2011057314A (ja) * | 2009-09-07 | 2011-03-24 | Murata Machinery Ltd | 基板の移載装置、およびその方法 |