JPS5028393A - - Google Patents

Info

Publication number
JPS5028393A
JPS5028393A JP49049302A JP4930274A JPS5028393A JP S5028393 A JPS5028393 A JP S5028393A JP 49049302 A JP49049302 A JP 49049302A JP 4930274 A JP4930274 A JP 4930274A JP S5028393 A JPS5028393 A JP S5028393A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49049302A
Other languages
Japanese (ja)
Other versions
JPS5514504B2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5028393A publication Critical patent/JPS5028393A/ja
Publication of JPS5514504B2 publication Critical patent/JPS5514504B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP4930274A 1973-05-08 1974-05-04 Expired JPS5514504B2 (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7306378A NL7306378A (enrdf_load_html_response) 1973-05-08 1973-05-08

Publications (2)

Publication Number Publication Date
JPS5028393A true JPS5028393A (enrdf_load_html_response) 1975-03-22
JPS5514504B2 JPS5514504B2 (enrdf_load_html_response) 1980-04-16

Family

ID=19818814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4930274A Expired JPS5514504B2 (enrdf_load_html_response) 1973-05-08 1974-05-04

Country Status (6)

Country Link
US (1) US3920990A (enrdf_load_html_response)
JP (1) JPS5514504B2 (enrdf_load_html_response)
DE (1) DE2420275C3 (enrdf_load_html_response)
FR (1) FR2229064B1 (enrdf_load_html_response)
GB (1) GB1470847A (enrdf_load_html_response)
NL (1) NL7306378A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194446A (en) * 1981-05-22 1982-11-30 Shimadzu Corp Charged particle energy analyzer

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4205226A (en) * 1978-09-01 1980-05-27 The Perkin-Elmer Corporation Auger electron spectroscopy
US4224518A (en) * 1978-12-21 1980-09-23 Varian Associates, Inc. Multistage cylindrical mirror analyzer incorporating a coaxial electron gun
US4588890A (en) * 1984-12-31 1986-05-13 International Business Machines Corporation Apparatus and method for composite image formation by scanning electron beam
US4633084A (en) * 1985-01-16 1986-12-30 The United States Of America As Represented By The United States Department Of Energy High efficiency direct detection of ions from resonance ionization of sputtered atoms
DE3803424C2 (de) * 1988-02-05 1995-05-18 Gsf Forschungszentrum Umwelt Verfahren zur quantitativen, tiefendifferentiellen Analyse fester Proben
US5095208A (en) * 1988-06-24 1992-03-10 Hitachi, Ltd. Charged particle generating device and focusing lens therefor
JPH0299828A (ja) * 1988-10-06 1990-04-11 Iseki & Co Ltd 流量測定器
US4941980A (en) * 1989-02-17 1990-07-17 Opal, Inc. System for measuring a topographical feature on a specimen
US5032724A (en) * 1990-08-09 1991-07-16 The Perkin-Elmer Corporation Multichannel charged-particle analyzer
JPH10511472A (ja) * 1994-12-08 1998-11-04 ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア 言語障害者間の語音の認識を向上させるための方法および装置
DE102004014582B4 (de) * 2004-03-25 2009-08-20 Bruker Daltonik Gmbh Ionenoptische Phasenvolumenkomprimierung
GB201011716D0 (en) 2010-07-13 2010-08-25 Shimadzu Corp Charged particle energy analysers and methods of operating charged particle energy analysers
US20240159919A1 (en) * 2021-02-01 2024-05-16 Rensselaer Polytechnic Institute Programmable and tunable cylindrical deflector analyzers

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid
JPS4832588A (enrdf_load_html_response) * 1971-08-27 1973-04-28

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1327572A (en) * 1971-03-23 1973-08-22 Ass Elect Ind Apparatus for use in charged particle spectroscopy

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid
JPS4832588A (enrdf_load_html_response) * 1971-08-27 1973-04-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194446A (en) * 1981-05-22 1982-11-30 Shimadzu Corp Charged particle energy analyzer

Also Published As

Publication number Publication date
GB1470847A (en) 1977-04-21
DE2420275B2 (de) 1980-09-25
JPS5514504B2 (enrdf_load_html_response) 1980-04-16
US3920990A (en) 1975-11-18
FR2229064A1 (enrdf_load_html_response) 1974-12-06
DE2420275A1 (de) 1974-11-28
FR2229064B1 (enrdf_load_html_response) 1977-06-24
NL7306378A (enrdf_load_html_response) 1974-11-12
DE2420275C3 (de) 1981-07-09

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