JPS5026535A - - Google Patents
Info
- Publication number
- JPS5026535A JPS5026535A JP7612873A JP7612873A JPS5026535A JP S5026535 A JPS5026535 A JP S5026535A JP 7612873 A JP7612873 A JP 7612873A JP 7612873 A JP7612873 A JP 7612873A JP S5026535 A JPS5026535 A JP S5026535A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Focusing (AREA)
- Lens Barrels (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7612873A JPS5238420B2 (es) | 1973-07-07 | 1973-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7612873A JPS5238420B2 (es) | 1973-07-07 | 1973-07-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5026535A true JPS5026535A (es) | 1975-03-19 |
| JPS5238420B2 JPS5238420B2 (es) | 1977-09-29 |
Family
ID=13596282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7612873A Expired JPS5238420B2 (es) | 1973-07-07 | 1973-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5238420B2 (es) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56105344U (es) * | 1980-01-18 | 1981-08-17 | ||
| JPS56102814A (en) * | 1980-01-18 | 1981-08-17 | Fuji Electric Co Ltd | Automatic focusing device for microscope |
| JPS5842807U (ja) * | 1981-09-14 | 1983-03-22 | 凸版印刷株式会社 | パタ−ン被検査体 |
| JPS58120106A (ja) * | 1982-01-12 | 1983-07-16 | Hitachi Ltd | 半導体ウエハの外観検査装置 |
-
1973
- 1973-07-07 JP JP7612873A patent/JPS5238420B2/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56105344U (es) * | 1980-01-18 | 1981-08-17 | ||
| JPS56102814A (en) * | 1980-01-18 | 1981-08-17 | Fuji Electric Co Ltd | Automatic focusing device for microscope |
| JPS5842807U (ja) * | 1981-09-14 | 1983-03-22 | 凸版印刷株式会社 | パタ−ン被検査体 |
| JPS6226754Y2 (es) * | 1981-09-14 | 1987-07-09 | ||
| JPS58120106A (ja) * | 1982-01-12 | 1983-07-16 | Hitachi Ltd | 半導体ウエハの外観検査装置 |
| JPS6361601B2 (es) * | 1982-01-12 | 1988-11-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5238420B2 (es) | 1977-09-29 |