JPS5023559A - - Google Patents

Info

Publication number
JPS5023559A
JPS5023559A JP49063810A JP6381074A JPS5023559A JP S5023559 A JPS5023559 A JP S5023559A JP 49063810 A JP49063810 A JP 49063810A JP 6381074 A JP6381074 A JP 6381074A JP S5023559 A JPS5023559 A JP S5023559A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49063810A
Other versions
JPS579495B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE2328590A external-priority patent/DE2328590C3/de
Priority claimed from DE2328589A external-priority patent/DE2328589C3/de
Application filed filed Critical
Publication of JPS5023559A publication Critical patent/JPS5023559A/ja
Publication of JPS579495B2 publication Critical patent/JPS579495B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2637—Circuits therefor for testing other individual devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
JP6381074A 1973-06-05 1974-06-05 Expired JPS579495B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2328590A DE2328590C3 (de) 1973-06-05 1973-06-05 Anordnung zum zerstörungsfreien Messen des örtlichen Verlaufs der elektrischen Leitfähigkeit einer Halbleiterscheibe
DE2328589A DE2328589C3 (de) 1973-06-05 1973-06-05 Anordnung zum zerstörungsfreien Messen des örtlichen Verlaufs der Trägerlebensdauer einer Halbleiterscheibe

Publications (2)

Publication Number Publication Date
JPS5023559A true JPS5023559A (ja) 1975-03-13
JPS579495B2 JPS579495B2 (ja) 1982-02-22

Family

ID=25765256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6381074A Expired JPS579495B2 (ja) 1973-06-05 1974-06-05

Country Status (3)

Country Link
US (1) US3953796A (ja)
JP (1) JPS579495B2 (ja)
IT (1) IT1014729B (ja)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4132945A (en) * 1977-12-27 1979-01-02 The United States Of America As Represented By The Secretary Of The Army System for aligning whip antenna matching base units
FR2460009B1 (fr) * 1979-06-26 1985-07-19 Metalimphy Procede de marquage et d'identification d'objets marques par des elements electriquement conducteurs
US5105158A (en) * 1990-02-13 1992-04-14 Space Systems/Loral, Inc. Dielectric microwave resonator probe
US5508610A (en) * 1992-12-03 1996-04-16 Georgia Tech Research Corporation Electrical conductivity tester and methods thereof for accurately measuring time-varying and steady state conductivity using phase shift detection
KR100209616B1 (ko) * 1994-11-15 1999-07-15 구자홍 유전체 재료의 유전율 측정장치
US7550963B1 (en) * 1996-09-20 2009-06-23 The Regents Of The University Of California Analytical scanning evanescent microwave microscope and control stage
DE10112499B4 (de) * 2001-03-15 2010-08-19 Hauni Maschinenbau Ag Resonatoreinrichtung, insbesondere Mikrowellenresonatoreinrichtung
US6600321B2 (en) 2001-04-18 2003-07-29 Baker Hughes Incorporated Apparatus and method for wellbore resistivity determination and imaging using capacitive coupling
US6809521B2 (en) 2001-04-18 2004-10-26 Baker Hughes Incorporated Apparatus and method for wellbore resistivity measurements in oil-based muds using capacitive coupling
US6714014B2 (en) 2001-04-18 2004-03-30 Baker Hughes Incorporated Apparatus and method for wellbore resistivity imaging using capacitive coupling
US6809542B2 (en) * 2002-10-03 2004-10-26 Mti Instruments Inc. Wafer resistance measurement apparatus and method using capacitively coupled AC excitation signal
US7449893B1 (en) * 2006-07-17 2008-11-11 Christos Tsironis Harmonic load pull tuner with resonant prematching module
CZ305210B6 (cs) * 2014-05-13 2015-06-10 České Vysoké Učení Technické V Praze, Fakulta Elektrotechnická Zařízení pro měření kapacity výkonových vysokonapěťových polovodičových součástek

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2859407A (en) * 1956-03-27 1958-11-04 Sylvania Electric Prod Method and device for measuring semiconductor parameters
US3234461A (en) * 1960-12-05 1966-02-08 Texas Instruments Inc Resistivity-measuring device including solid inductive sensor
CH408202A (de) * 1963-08-09 1966-02-28 Siemens Ag Verfahren zur Bestimmung des elektrischen Widerstandes eines Körpers aus extrem reinem Halbleitermaterial für elektronische Zwecke
US3452279A (en) * 1966-03-03 1969-06-24 Bell Telephone Labor Inc Test fixture for measuring impedance parameters of diodes operated at microwave frequencies
US3805160A (en) * 1972-04-25 1974-04-16 Ibm Method for non-contact semiconductor resistivity measurement

Also Published As

Publication number Publication date
US3953796A (en) 1976-04-27
JPS579495B2 (ja) 1982-02-22
IT1014729B (it) 1977-04-30

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