JPS5022577A - - Google Patents

Info

Publication number
JPS5022577A
JPS5022577A JP48072068A JP7206873A JPS5022577A JP S5022577 A JPS5022577 A JP S5022577A JP 48072068 A JP48072068 A JP 48072068A JP 7206873 A JP7206873 A JP 7206873A JP S5022577 A JPS5022577 A JP S5022577A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48072068A
Other languages
Japanese (ja)
Other versions
JPS5548693B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7206873A priority Critical patent/JPS5548693B2/ja
Publication of JPS5022577A publication Critical patent/JPS5022577A/ja
Publication of JPS5548693B2 publication Critical patent/JPS5548693B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP7206873A 1973-06-26 1973-06-26 Expired JPS5548693B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7206873A JPS5548693B2 (enrdf_load_stackoverflow) 1973-06-26 1973-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7206873A JPS5548693B2 (enrdf_load_stackoverflow) 1973-06-26 1973-06-26

Publications (2)

Publication Number Publication Date
JPS5022577A true JPS5022577A (enrdf_load_stackoverflow) 1975-03-11
JPS5548693B2 JPS5548693B2 (enrdf_load_stackoverflow) 1980-12-08

Family

ID=13478700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7206873A Expired JPS5548693B2 (enrdf_load_stackoverflow) 1973-06-26 1973-06-26

Country Status (1)

Country Link
JP (1) JPS5548693B2 (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5239364A (en) * 1975-09-25 1977-03-26 Hitachi Ltd Apparatus for printing pattern for shadow mask on dry plate
JPS5459883A (en) * 1978-10-11 1979-05-14 Hitachi Ltd Pattern printing apparatus
JPS56500196A (enrdf_load_stackoverflow) * 1979-02-14 1981-02-19
JPS5897008A (ja) * 1981-12-04 1983-06-09 Hitachi Ltd 半導体レ−ザとコリメ−タレンズの位置決め方法
US4598197A (en) * 1982-08-09 1986-07-01 Hitachi, Ltd. Projection aligner
JPH02207520A (ja) * 1989-02-07 1990-08-17 Canon Inc 露光装置
JPH03123016A (ja) * 1990-08-15 1991-05-24 Hitachi Ltd 露光方法
JPH08102441A (ja) * 1995-07-28 1996-04-16 Canon Inc 投影露光装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5239364A (en) * 1975-09-25 1977-03-26 Hitachi Ltd Apparatus for printing pattern for shadow mask on dry plate
JPS5459883A (en) * 1978-10-11 1979-05-14 Hitachi Ltd Pattern printing apparatus
JPS56500196A (enrdf_load_stackoverflow) * 1979-02-14 1981-02-19
JPS5897008A (ja) * 1981-12-04 1983-06-09 Hitachi Ltd 半導体レ−ザとコリメ−タレンズの位置決め方法
US4598197A (en) * 1982-08-09 1986-07-01 Hitachi, Ltd. Projection aligner
JPH02207520A (ja) * 1989-02-07 1990-08-17 Canon Inc 露光装置
JPH03123016A (ja) * 1990-08-15 1991-05-24 Hitachi Ltd 露光方法
JPH08102441A (ja) * 1995-07-28 1996-04-16 Canon Inc 投影露光装置

Also Published As

Publication number Publication date
JPS5548693B2 (enrdf_load_stackoverflow) 1980-12-08

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