JPS5022577A - - Google Patents
Info
- Publication number
- JPS5022577A JPS5022577A JP48072068A JP7206873A JPS5022577A JP S5022577 A JPS5022577 A JP S5022577A JP 48072068 A JP48072068 A JP 48072068A JP 7206873 A JP7206873 A JP 7206873A JP S5022577 A JPS5022577 A JP S5022577A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7206873A JPS5548693B2 (de) | 1973-06-26 | 1973-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7206873A JPS5548693B2 (de) | 1973-06-26 | 1973-06-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5022577A true JPS5022577A (de) | 1975-03-11 |
| JPS5548693B2 JPS5548693B2 (de) | 1980-12-08 |
Family
ID=13478700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7206873A Expired JPS5548693B2 (de) | 1973-06-26 | 1973-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5548693B2 (de) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5239364A (en) * | 1975-09-25 | 1977-03-26 | Hitachi Ltd | Apparatus for printing pattern for shadow mask on dry plate |
| JPS5459883A (en) * | 1978-10-11 | 1979-05-14 | Hitachi Ltd | Pattern printing apparatus |
| JPS56500196A (de) * | 1979-02-14 | 1981-02-19 | ||
| JPS5897008A (ja) * | 1981-12-04 | 1983-06-09 | Hitachi Ltd | 半導体レ−ザとコリメ−タレンズの位置決め方法 |
| US4598197A (en) * | 1982-08-09 | 1986-07-01 | Hitachi, Ltd. | Projection aligner |
| JPH02207520A (ja) * | 1989-02-07 | 1990-08-17 | Canon Inc | 露光装置 |
| JPH03123016A (ja) * | 1990-08-15 | 1991-05-24 | Hitachi Ltd | 露光方法 |
| JPH08102441A (ja) * | 1995-07-28 | 1996-04-16 | Canon Inc | 投影露光装置 |
-
1973
- 1973-06-26 JP JP7206873A patent/JPS5548693B2/ja not_active Expired
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5239364A (en) * | 1975-09-25 | 1977-03-26 | Hitachi Ltd | Apparatus for printing pattern for shadow mask on dry plate |
| JPS5459883A (en) * | 1978-10-11 | 1979-05-14 | Hitachi Ltd | Pattern printing apparatus |
| JPS56500196A (de) * | 1979-02-14 | 1981-02-19 | ||
| JPS5897008A (ja) * | 1981-12-04 | 1983-06-09 | Hitachi Ltd | 半導体レ−ザとコリメ−タレンズの位置決め方法 |
| JPH0517528B2 (de) * | 1981-12-04 | 1993-03-09 | Hitachi Ltd | |
| US4598197A (en) * | 1982-08-09 | 1986-07-01 | Hitachi, Ltd. | Projection aligner |
| JPH02207520A (ja) * | 1989-02-07 | 1990-08-17 | Canon Inc | 露光装置 |
| JPH03123016A (ja) * | 1990-08-15 | 1991-05-24 | Hitachi Ltd | 露光方法 |
| JPH0546088B2 (de) * | 1990-08-15 | 1993-07-13 | Hitachi Ltd | |
| JPH08102441A (ja) * | 1995-07-28 | 1996-04-16 | Canon Inc | 投影露光装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5548693B2 (de) | 1980-12-08 |