JPS5021985A - - Google Patents
Info
- Publication number
- JPS5021985A JPS5021985A JP7285173A JP7285173A JPS5021985A JP S5021985 A JPS5021985 A JP S5021985A JP 7285173 A JP7285173 A JP 7285173A JP 7285173 A JP7285173 A JP 7285173A JP S5021985 A JPS5021985 A JP S5021985A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7285173A JPS5232758B2 (ja) | 1973-06-29 | 1973-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7285173A JPS5232758B2 (ja) | 1973-06-29 | 1973-06-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5021985A true JPS5021985A (ja) | 1975-03-08 |
| JPS5232758B2 JPS5232758B2 (ja) | 1977-08-23 |
Family
ID=13501280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7285173A Expired JPS5232758B2 (ja) | 1973-06-29 | 1973-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5232758B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002343563A (ja) * | 2001-05-15 | 2002-11-29 | Sony Corp | 真空成膜方法および真空成膜装置 |
-
1973
- 1973-06-29 JP JP7285173A patent/JPS5232758B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002343563A (ja) * | 2001-05-15 | 2002-11-29 | Sony Corp | 真空成膜方法および真空成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5232758B2 (ja) | 1977-08-23 |